Morphology, composition and electrical properties of SnO2:Cl thin films grown by atomic layer deposition | Citedby Results | Journal of Vacuum Science & Technology A | AIP Publishing

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Morphology, composition and electrical properties of SnO₂:Cl thin films grown by atomic layer deposition

J. Vac. Sci. Technol. A 34, 01A112 (2016)

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