Skip to Main Content
Skip Nav Destination

Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors

J. Vac. Sci. Technol. A 34, 01A138 (2016)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Rui Xu
  • Zhongchao Zhou
  • Jing Li
  • Xu Zhang
  • Yuanyuan Zhu
  • Hongping Xiao
  • Lina Xu
  • Yihong Ding
  • Aidong Li
  • Guoyong Fang
Frontiers in Chemistry (2022) 10
  • Karsten Arts
  • Harvey Thepass
  • Marcel A. Verheijen
  • Riikka L. Puurunen
  • Wilhelmus M. M. Kessels
  • Harm C. M. Knoops
Chemistry of Materials 33, 5002 (2021)
  • Margarita Lapteva
  • Vivek Beladiya
  • Sebastian Riese
  • Phillip Hanke
  • Felix Otto
  • Torsten Fritz
  • Paul Schmitt
  • Olaf Stenzel
  • Andreas Tünnermann
  • Adriana Szeghalmi
Optical Materials Express 11, 1918 (2021)
  • Karsten Arts
  • Sanne Deijkers
  • Riikka L. Puurunen
  • Wilhelmus M. M. Kessels
  • Harm C. M. Knoops
The Journal of Physical Chemistry C 125, 8244 (2021)
  • D. Blaschke
  • F. Munnik
  • J. Grenzer
  • L. Rebohle
  • H. Schmidt
  • P. Zahn
  • S. Gemming
Applied Surface Science (2020) 506: 144188.
  • Yichi Zhang
  • Yangyao Ding
  • Panagiotis D. Christofides
Computers & Chemical Engineering (2020) 142: 107066.
  • Nathaniel E. Richey
  • Camila de Paula
  • Stacey F. Bent
The Journal of Chemical Physics (2020) 152 (4)
  • Kyoung-Mun Kim
  • Jin Sub Jang
  • Soon-Gil Yoon
  • Ju-Young Yun
  • Nak-Kwan Chung
Materials 13, 2008 (2020)
  • Yangyao Ding
  • Yichi Zhang
  • Gerassimos Orkoulas
  • Panagiotis D. Christofides
Chemical Engineering Research and Design (2020) 159: 439.
  • Jaron A. Kropp
  • Ankit Sharma
  • Wenjuan Zhu
  • Can Ataca
  • Theodosia Gougousi
ACS Applied Materials & Interfaces 12, 48150 (2020)
  • Sarai García-García
  • Alberto López-Ortega
  • Yongping Zheng
  • Yifan Nie
  • Kyeongjae Cho
  • Andrey Chuvilin
  • Mato Knez
Chemical Science 10, 2171 (2019)
  • Michael J. Mortelliti
  • Annie N. Wang
  • Jillian L. Dempsey
Polyhedron (2019) 171: 433.
  • David Zanders
  • Engin Ciftyurek
  • Ersoy Subaşı
  • Niklas Huster
  • Claudia Bock
  • Aleksander Kostka
  • Detlef Rogalla
  • Klaus Schierbaum
  • Anjana Devi
ACS Applied Materials & Interfaces 11, 28407 (2019)
  • Sungjoon Kim
  • Sunyoung Lee
  • So-Yeon Ham
  • Dong-Hyun Ko
  • Seokhee Shin
  • Zhenyu Jin
  • Yo-Sep Min
Applied Surface Science (2019) 469: 804.
  • N. Schneider
  • M. Frégnaux
  • M. Bouttemy
  • F. Donsanti
  • A. Etcheberry
  • D. Lincot
Materials Today Chemistry (2018) 10: 142.
  • Krystian Król
  • Mariusz Sochacki
  • Andrzej Taube
  • Norbert Kwietniewski
  • Sylwia Gierałtowska
  • Łukasz Wachnicki
  • Marek Godlewski
  • Jan Szmidt
physica status solidi (a) (2018) 215 (13)
  • C. Goehry
  • N. Schneider
The Journal of Physical Chemistry C 121, 5871 (2017)
  • Zheng Chen
  • Haoran Wang
  • Pengpeng Xiong
  • Ping Chen
  • Huiying Li
  • Yunfei Liu
  • Yu Duan
The Journal of Physical Chemistry C 121, 4714 (2017)
  • Shasha Zhang
  • David E. Speed
  • Steven R. Trammell
  • Susan T. Sharfstein
Journal of Loss Prevention in the Process Industries (2017) 45: 78.
  • Jiun-Ruey Chen
  • Wenyu Zhang
  • Rambert K. Nahm
  • Michael A. DiFeo
  • James R. Engstrom
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (2017) 35 (6)
Close Modal

or Create an Account

Close Modal
Close Modal