Skip to Main Content
Skip Nav Destination

Characterization of thin film adhesion by MEMS shaft-loading blister testing

J. Vac. Sci. Technol. A 31, 031102 (2013)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Michael D. Bartlett
  • Scott W. Case
  • Anthony J. Kinloch
  • David A. Dillard
Progress in Materials Science (2023) 137: 101086.
  • Jiazhen Zhang
  • Peijian Chen
  • Juan Peng
  • Yingying Zhang
Frontiers in Mechanical Engineering (2022) 8
  • Bin Zhang
  • Xu Yan
  • Yuan Xu
  • Huai-Song Zhao
  • Miao Yu
  • Yun-Ze Long
Advances in Materials Science and Engineering (2020) 2020: 1.
  • Annarita Cutrone
  • Silvestro Micera
Advanced Healthcare Materials (2019) 8 (24)
  • Haiyang Qi
  • Xia Xiao
  • Tao Kong
Japanese Journal of Applied Physics 58, SHHG03 (2019)
  • Robert Tang-Kong
  • Roy Winter
  • Ryan Brock
  • Jared Tracy
  • Moshe Eizenberg
  • Reinhold H. Dauskardt
  • Paul C. McIntyre
ACS Applied Materials & Interfaces 10, 37103 (2018)
  • Xia Xiao
  • Haiyang Qi
  • Xiaole Sui
  • Takamaro Kikkawa
Applied Surface Science (2017) 399: 599.
  • Mohamed M El Gowini
  • Walied A Moussa
Journal of Micromechanics and Microengineering 25, 035031 (2015)
  • Jussi Lyytinen
  • Xuwen Liu
  • Oili M.E. Ylivaara
  • Sakari Sintonen
  • Ajai Iyer
  • Saima Ali
  • Jaakko Julin
  • Harri Lipsanen
  • Timo Sajavaara
  • Riikka L. Puurunen
  • Jari Koskinen
Wear (2015) 342-343: 270.
  • J. Lyytinen
  • M. Berdova
  • P. Hirvonen
  • X. W. Liu
  • S. Franssila
  • Q. Zhou
  • J. Koskinen
RSC Adv. 4, 37320 (2014)
  • Maria Berdova
  • Tuomo Ylitalo
  • Ivan Kassamakov
  • Jouni Heino
  • Pekka T. Törmä
  • Lauri Kilpi
  • Helena Ronkainen
  • Jari Koskinen
  • Edward Hæggström
  • Sami Franssila
Acta Materialia (2014) 66: 370.
  • Jussi Lyytinen
  • Maria Berdova
  • Sami Franssila
  • Jari Koskinen
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (2014) 32 (1)
Close Modal

or Create an Account

Close Modal
Close Modal