Skip to Main Content
Skip Nav Destination

High power impulse magnetron sputtering discharge

J. Vac. Sci. Technol. A 30, 030801 (2012)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Keita Mukogawa
  • Hiroharu Sugawara
  • Mizuki Fujiwara
  • Tetsushi Matsuoka
  • Tetsuhide Shimizu
  • Taiki Yamamoto
  • Naoto Saito
  • Tamaki Hattori
  • Tatsuro Hanahjiri
  • Shunji Kurosu
JJAP Conference Proceedings 10, 011003 (2023)
  • Movaffaq Kateb
  • Jon Tomas Gudmundsson
  • Snorri Ingvarsson
Surfaces and Interfaces (2023) 38: 102783.
  • Sri Bharani Ghantasala
  • Sumitra Sharma
physica status solidi (a) (2023) 220 (2)
  • V G Antunes
  • M Rudolph
  • A Kapran
  • H Hajihoseini
  • M A Raadu
  • N Brenning
  • J T Gudmundsson
  • D Lundin
  • T Minea
Plasma Sources Science and Technology 32, 075016 (2023)
  • Takayuki Ohta
  • Jo Matsushima
  • Shinsuke Kunitsugu
  • Akinori Oda
  • Hiroyuki Kousaka
Japanese Journal of Applied Physics 62, SL1019 (2023)
  • Erwan Morel
  • Yoann Rozier
  • Abderzak El Farsy
  • Tiberiu Minea
Journal of Applied Physics (2023) 133 (15)
  • Dongsen Geng
  • Yu X. Xu
  • Qimin Wang
Surface and Coatings Technology (2023) 456: 129235.
  • M. Renner
  • J. Fischer
  • H. Hajihoseini
  • J. T. Gudmundsson
  • M. Rudolph
  • D. Lundin
Journal of Vacuum Science & Technology A (2023) 41 (3)
  • Jyotish Patidar
  • Amit Sharma
  • Siarhei Zhuk
  • Giacomo Lorenzin
  • Claudia Cancellieri
  • Martin F. Sarott
  • Morgan Trassin
  • Kerstin Thorwarth
  • Johann Michler
  • Sebastian Siol
Surface and Coatings Technology (2023) 468: 129719.
  • Marta P. Ferreira
  • D. Martínez-Martínez
  • J.-B. Chemin
  • P. Choquet
Surface and Coatings Technology (2023) 466: 129648.
  • A. Mukherjee
  • A. Momeni
  • A.R. Allouche
  • E.M. Staicu Casagrande
  • T. Minea
  • H. Khemliche
Surfaces and Interfaces (2023) 37: 102754.
  • V O Oskirko
  • V Y Kozhevnikov
  • S V Rabotkin
  • A P Pavlov
  • V A Semenov
  • A A Solovyev
Plasma Sources Science and Technology 32, 075007 (2023)
  • Zachary Jeckell
  • David E Barlaz
  • Thomas Houlahan
  • Wolfgang Huber
  • Ian Haehnlein
  • Brian Jurczyk
  • David N Ruzic
Physica Scripta 98, 015605 (2023)
  • J Hnilica
  • P Klein
  • P Vašina
  • R Snyders
  • N Britun
Plasma Sources Science and Technology 32, 045003 (2023)
  • Eisuke Yokoyama
  • Masaomi Sanekata
  • Nobuo Nishimiya
  • Masahide Tona
  • Hiroaki Yamamoto
  • Keizo Tsukamoto
  • Kiyokazu Fuke
  • Keijiro Ohshimo
  • Fuminori Misaizu
Japanese Journal of Applied Physics 62, SL1008 (2023)
  • Benjamin Jorns
  • Trevor Lafleur
Plasma Sources Science and Technology 32, 014001 (2023)
  • H. Hajihoseini
  • N. Brenning
  • M. Rudolph
  • M. A. Raadu
  • D. Lundin
  • J. Fischer
  • T. M. Minea
  • J. T. Gudmundsson
Journal of Vacuum Science & Technology A (2023) 41 (1)
  • Xuebing Bai
  • Qun Cai
  • Wenhao Xie
  • Yuqiao Zeng
  • Xuhai Zhang
Journal of Materials Science 58, 1243 (2023)
  • Marcus A Law
  • Francis Lockwood Estrin
  • Paul M Bryant
  • Mark D Bowden
  • James W Bradley
Plasma Sources Science and Technology 32, 025015 (2023)
  • Min Gyeong Cho
  • Unhyeon Kang
  • Sang Ho Lim
  • Seunghee Han
Thin Solid Films (2023) 767: 139668.
  • Tiago C. Dias
  • Antonio Tejero-del-Caz
  • Luís L. Alves
  • Vasco Guerra
Computer Physics Communications (2023) 282: 108554.
  • Ding-Yeong Wang
  • Kuei-Chih Lin
  • Yong-Chang Chen
  • Pi-Chun Juan
ECS Journal of Solid State Science and Technology 12, 065004 (2023)
  • Kevin Köhn
  • Dennis Krüger
  • Denis Eremin
  • Liang Xu
  • Ralf Peter Brinkmann
Plasma Sources Science and Technology 32, 055012 (2023)
  • Anna Kapran
  • Vinicius G. Antunes
  • Zdeněk Hubička
  • Charles Ballage
  • Tiberiu Minea
Journal of Vacuum Science & Technology A (2023) 41 (1)
  • Chuanlong Ma
  • Anton Nikiforov
  • Dirk Hegemann
  • Nathalie De Geyter
  • Rino Morent
  • Kostya (Ken) Ostrikov
International Materials Reviews 68, 82 (2023)
  • Swetha Suresh Babu
  • Martin Rudolph
  • Peter John Ryan
  • Joel Fischer
  • Daniel Lundin
  • James W Bradley
  • Jon Tomas Gudmundsson
Plasma Sources Science and Technology 32, 034003 (2023)
  • Sanath Kumar Honnali
  • Charlotte Poterie
  • Arnaud le Febvrier
  • Daniel Lundin
  • Grzegorz Greczynski
  • Per Eklund
Journal of Vacuum Science & Technology A (2023) 41 (4)
  • Hiroyuki Fukue
  • Tatsuyuki Nakatani
  • Tadayuki Okano
  • Masahide Kuroiwa
  • Shinsuke Kunitsugu
  • Hiroki Oota
  • Ken Yonezawa
Diamond and Related Materials (2023) 135: 109868.
  • Wenjie Cheng
  • Jingjing Wang
  • Ping Liu
  • Xun Ma
  • Ke Zhang
  • Fengcang Ma
  • Xiaohong Chen
  • Wei Li
  • Peter K. Liaw
Materials Science and Engineering: A (2023) 864: 144555.
  • Jürgen Guljakow
  • Walter Lang
Coatings 13, 250 (2023)
  • D. Vavassori
  • F. Mirani
  • F. Gatti
  • D. Dellasega
  • M. Passoni
Surface and Coatings Technology (2023) 458: 129343.
  • Ding-Yeong Wang
  • Kuei-Chih Lin
  • Cheng-Li Lin
  • Chih-Yi Lin
  • Pi-Chun Juan
Journal of Applied Physics (2023) 133 (5)
  • Lena Patterer
  • Sabrina Kollmann
  • Teresa de los Arcos
  • Leonie Jende
  • Soheil Karimi Aghda
  • Damian M. Holzapfel
  • Sameer A. Salman
  • Stanislav Mráz
  • Guido Grundmeier
  • Jochen M. Schneider
Journal of Vacuum Science & Technology A (2023) 41 (5)
  • Dennis Krüger
  • Kevin Köhn
  • Liang Xu
  • Denis Eremin
  • Ralf Peter Brinkmann
Plasma Sources Science and Technology 32, 045011 (2023)
  • Viktor I. Shapovalov
Materials 16, 3258 (2023)
  • Anthika Lakhonchai
  • Artit Chingsungnoen
  • Phitsanu Poolcharuansin
  • Nitisak Pasaja
  • Phuwanai Bunnak
  • Mongkhol Suwanno
Thin Solid Films (2022) 747: 139140.
  • Takayuki OHTA
  • Rikuto OGUSHI
  • Akinori ODA
  • Hiroyuki KOUSAKA
Journal of The Surface Finishing Society of Japan 73, 47 (2022)
  • Ohyung Kwon
  • Nayeon Lee
  • Kangil Kim
IEEE Transactions on Semiconductor Manufacturing 35, 256 (2022)
  • Anastasiya Sergievskaya
  • Adrien Chauvin
  • Stephanos Konstantinidis
Beilstein Journal of Nanotechnology (2022) 13: 10.
  • M. Zubkins
  • A. Sarakovskis
  • E. Strods
  • L. Bikse
  • B. Polyakov
  • A. Kuzmin
  • V. Vibornijs
  • J. Purans
Materials Chemistry and Physics (2022) 289: 126399.
  • D. Boivin
  • A. Najah
  • R. Jean-Marie-Désirée
  • C. Noël
  • G. Henrion
  • S. Cuynet
  • L. De Poucques
Surface and Coatings Technology (2022) 433: 128073.
  • Jon Tomas Gudmundsson
  • André Anders
  • Achim von Keudell
Plasma Sources Science and Technology 31, 083001 (2022)
  • K. Bobzin
  • C. Kalscheuer
  • M. Carlet
  • C. Schulze
Thin Solid Films (2022) 742: 139028.
Close Modal

or Create an Account

Close Modal
Close Modal