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Special Topic Collection on Atomic Layer Deposition (ALD)

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting, the Journal of Vacuum Science and Technology A, publishes a collection of articles covering the most recent developments and experimental studies in ALD. This ALD Special Topic Collection includes papers presented at the ALD 2019 Workshops held in Bellevue, Washington, July 21-24, 2019 as well as other ALD research articles that were not presented at this conference but submitted to the call for the special collection. The Collection features articles dedicated to the science and technology of atomic layer controlled deposition.

Image Credit: Margaret Wolf, Veronica Hayes, Cynthia R. Gerber, Philip G. Quardokus, Jose J. Ortiz-Garcia, Casey Plummer and Rebecca C. Quardokus, JVST A 38(2), 10.1116/1.5139672, (2020).

Special Collection Image
Raffaella Lo Nigro; Emanuela Schilirò; Patrick Fiorenza; Fabrizio Roccaforte
Erika Maeda; Toshihide Nabatame; Masafumi Hirose; Mari Inoue; Akihiko Ohi; Naoki Ikeda; Hajime Kiyono
Masaki Hirayama; Akinobu Teramoto; Shigetoshi Sugawa
Neha Mahuli; Debabrata Halder; Ankan Paul; Shaibal K. Sarkar
Pravakar P. Rajbhandari; Tara P. Dhakal
Yong Chan Jung; In-Sung Park; Sejong Seong; Taehoon Lee; Seon Yong Kim; Jinho Ahn
Seung-Min Han; Dip K. Nandi; Yong-Hwan Joo; Toshiyuki Shigetomi; Kazuharu Suzuki; Shunichi Nabeya; Ryosuke Harada; Soo-Hyun Kim
Igor Krylov; Yuanshen Qi; Valentina Korchnoy; Kamira Weinfeld; Moshe Eizenberg; Eilam Yalon
Spyridon Korkos; Nikolaos J. Xanthopoulos; Martha A. Botzakaki; Charalampos Drivas; Styliani Kennou; Spyridon Ladas; Anastasios Travlos; Stavroula N. Georga; Christoforos A. Krontiras
Thanh Tung Le; John G. Ekerdt
Angel Yanguas-Gil
David Dustin Fischer; Martin Knaut; Johanna Reif; Frederik Nehm; Matthias Albert; Johann W. Bartha
Sun Jung Kim; Sang Heon Yong; You Jin Choi; Hyeok Hwangbo; Woo-Young Yang; Heeyeop Chae
Valerio Di Palma; Harm C. M. Knoops; Wilhelmus M. M. (Erwin) Kessels; Mariadriana Creatore
LiAo Cao; Felix Mattelaer; Timo Sajavaara; Jolien Dendooven; Christophe Detavernier
Yuta Nakagawa; Kazuhiro Gotoh; Markus Wilde; Shohei Ogura; Yasuyoshi Kurokawa; Katsuyuki Fukutani; Noritaka Usami
Josette L. T. M. Moret; Matthew B. E. Griffiths; Jeannine E. B. M. Frijns; Baukje E. Terpstra; Hubert T. Wolterbeek; Seán T. Barry; Antonia G. Denkova; J. Ruud van Ommen
Margaret Wolf; Veronica Hayes; Cynthia R. Gerber; Philip G. Quardokus; Jose J. Ortiz-Garcia; Casey Plummer; Rebecca C. Quardokus
Fumikazu Mizutani; Shintaro Higashi; Mari Inoue; Toshihide Nabatame
GeonHo Baek; Seunghwan Lee; Jung-Hoon Lee; Jin-Seong Park
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