Skip Nav Destination
2018 Special Collection on Atomic Layer Deposition (ALD)
Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting, the Journal of Vacuum Science and Technology A, publishes a large group of papers covering the most recent developments and research in ALD. This ALD Special Topic Collection includes ALD papers published in 2018. Papers are from ALD 2017 held in Denver, CO, July 15-18, 2017 and some (those published in 2018) are from ALD 2018 held in Incheon, South Korea from July 29 – August 1, 2018. The Collection features articles dedicated to the science and technology of atomic layer controlled deposition.