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2018 Special Collection on Atomic Layer Deposition (ALD)

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting, the Journal of Vacuum Science and Technology A, publishes a large group of papers covering the most recent developments and research in ALD. This ALD Special Topic Collection includes ALD papers published in 2018. Papers are from ALD 2017 held in Denver, CO, July 15-18, 2017 and some (those published in 2018) are from ALD 2018 held in Incheon, South Korea from July 29 – August 1, 2018. The Collection features articles dedicated to the science and technology of atomic layer controlled deposition.

Special Collection Image
Eric C. Stevens; Moataz Bellah M. Mousa; Gregory N. Parsons
Igor Krylov; Xianbin Xu; Ekaterina Zoubenko; Kamira Weinfeld; Santiago Boyeras; Felix Palumbo; Moshe Eizenberg; Dan Ritter
Shinya Iwashita; Tsuyoshi Moriya; Akira Uedono
Mark J. Sowa; Ling Ju; Alexander C. Kozen; Nicholas C. Strandwitz; Guosong Zeng; Tomas F. Babuska; Zakaria Hsain; Brandon A. Krick
Violeta Prodanovic´; Hong Wah Chan; Anil U. Mane; Jeffrey W. Elam; Matthias M. Minjauw; Christophe Detavernier; Harry van der Graaf; Pasqualina M. Sarro
Jaron A. Kropp; Yuhang Cai; Zihan Yao; Wenjuan Zhu; Theodosia Gougousi
Perttu Sippola; Alexander Pyymaki Perros; Oili M. E. Ylivaara; Helena Ronkainen; Jaakko Julin; Xuwen Liu; Timo Sajavaara; Jarkko Etula; Harri Lipsanen; Riikka L. Puurunen
Lauri Kilpi; Oili M. E. Ylivaara; Antti Vaajoki; Xuwen Liu; Ville Rontu; Sakari Sintonen; Eero Haimi; Jari Malm; Markus Bosund; Marko Tuominen; Timo Sajavaara; Harri Lipsanen; Simo-Pekka Hannula; Riikka L. Puurunen; Helena Ronkainen
Alexander S. Yersak; Kashish Sharma; Jasmine M. Wallas; Arrelaine A. Dameron; Xuemin Li; Yongan Yang; Katherine E. Hurst; Chunmei Ban; Robert C. Tenent; Steven M. George
Pascal Düngen; Mark Greiner; Karl-Heinz Böhm; Ioannis Spanos; Xing Huang; Alexander A. Auer; Robert Schlögl; Saskia Heumann
Nicolaie Moldovan; Ralu Divan; Hongjun Zeng; Leonidas E. Ocola; Vincent De Andrade; Michael Wojcik
Anil U. Mane; Steven Letourneau; David J. Mandia; Jian Liu; Joseph A. Libera; Yu Lei; Qing Peng; Elton Graugnard; Jeffrey W. Elam
Siliang Chang; Christos G. Takoudis
Martha A. Botzakaki; George Skoulatakis; Nikolaos Xanthopoulos; Violetta Gianneta; Anastasios Travlos; Stella Kennou; Spyridon Ladas; Christos Tsamis; Eleni Makarona; Stavroula N. Georga; Christoforos A. Krontiras
Jae-Min Park; Seongyoon Kim; June Hwang; Won Seok Han; Wonyong Koh; Won-Jun Lee
Jaclyn K. Sprenger; Huaxing Sun; Andrew S. Cavanagh; Steven M. George
Daniel J. Higgs; Jaime W. DuMont; Kashish Sharma; Steven M. George
Evan Oudot; Mickael Gros-Jean; Kristell Courouble; Francois Bertin; Romain Duru; Névine Rochat; Christophe Vallée
Lukas Hoffmann; Detlef Theirich; Daniel Schlamm; Tim Hasselmann; Sven Pack; Kai Oliver Brinkmann; Detlef Rogalla; Sven Peters; André Räupke; Hassan Gargouri; Thomas Riedl
Jakob Kuhs; Zeger Hens; Christophe Detavernier
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