1-20 of 271
Electron-beam lithography
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Electron four-petal Lorentz–Gauss vortex beam

Editor’s PickOpen Access
Zhejue Fan, Haoyu Huang, Huilin Tang, Hailong Wu, Dongmei Deng
Journal: Journal of Applied Physics
J. Appl. Phys. 137, 193102 (2025)
https://doi.org/10.1063/5.0250735
Published: May 2025
View articletitled, Electron four-petal Lorentz–Gauss vortex beam
Open the PDF for Electron four-petal Lorentz–Gauss vortex beam in another window
Journal Articles

Highly stable aluminum air-bridges with stiffeners

Open Access
Aleksey N. Bolgar, Daria A. Kalacheva, Viktor B. Lubsanov, Aleksei Yu. Dmitriev, Evgenia S. Alekseeva, Evgeny V. Korostylev, Oleg V. Astafiev
Journal: Journal of Applied Physics
J. Appl. Phys. 137, 154401 (2025)
https://doi.org/10.1063/5.0260833
Published: April 2025
View articletitled, Highly stable aluminum air-bridges with stiffeners
Open the PDF for Highly stable aluminum air-bridges with stiffeners in another window
Journal Articles

Cryogenic behavior of high-permittivity gate dielectrics: The impact of atomic layer deposition temperature and the lithographic patterning method

Open Access
Alessandro Paghi, Sebastiano Battisti, Simone Tortorella, Giorgio De Simoni, Francesco Giazotto
Journal: Journal of Applied Physics
J. Appl. Phys. 137, 044103 (2025)
https://doi.org/10.1063/5.0250428
Published: January 2025
View articletitled, Cryogenic behavior of high-permittivity gate dielectrics: The impact of atomic layer deposition temperature and the lithographic patterning method
Open the PDF for Cryogenic behavior of high-permittivity gate dielectrics: The impact of atomic layer deposition temperature and the lithographic patterning method in another window
Journal Articles

Tuning the coercivity of synthetic antiferromagnetic nanoplatelets with perpendicular anisotropy by varying the Co1−xBx alloy composition

Open Access
J. Li, W. Sijtsma, B. Koopmans, R. Lavrijsen
Journal: Journal of Applied Physics
J. Appl. Phys. 135, 123902 (2024)
https://doi.org/10.1063/5.0179366
Published: March 2024
View articletitled, Tuning the coercivity of synthetic antiferromagnetic nanoplatelets with perpendicular anisotropy by varying the Co1−xBx alloy composition
Open the PDF for Tuning the coercivity of synthetic antiferromagnetic nanoplatelets with perpendicular anisotropy by varying the Co1−xBx alloy composition in another window
Journal Articles

Low-damage electron beam lithography for nanostructures on B i 2 T e 3 -class topological insulator thin films

Available to Purchase
Molly P. Andersen, Linsey K. Rodenbach, Ilan T. Rosen, Stanley C. Lin, Lei Pan, Peng Zhang, Lixuan Tai, Kang L. Wang, Marc A. Kastner, David Goldhaber-Gordon
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 244301 (2023)
https://doi.org/10.1063/5.0144726
Published: June 2023
View articletitled, Low-damage electron beam lithography for nanostructures on B i 2 T e 3 -class topological insulator thin films
Open the PDF for Low-damage electron beam lithography for nanostructures on B i 2 T e 3 -class topological insulator thin films in another window
Includes: Supplementary data
Journal Articles

NV-doped microstructures with preferential orientation by growth on heteroepitaxial diamond

Open Access
Jürgen Weippert, Jan Engels, Patricia Quellmalz, Christian Giese, Tingpeng Luo, Niklas Mathes, Lukas Lindner, Jan Jeske, Peter Knittel, Lutz Kirste, Jan Kustermann, Vadim Lebedev
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 234401 (2023)
https://doi.org/10.1063/5.0148067
Published: June 2023
View articletitled, NV-doped microstructures with preferential orientation by growth on heteroepitaxial diamond
Open the PDF for NV-doped microstructures with preferential orientation by growth on heteroepitaxial diamond in another window
Includes: Supplementary data
Journal Articles

Selective amorphization of SiGe in Si/SiGe nanostructures via high energy Si+ implant

Editor’s PickFree
Emily M. Turner, Quinn Campbell, Ibrahim Avci, William J. Weber, Ping Lu, George T. Wang, Kevin S. Jones
Journal: Journal of Applied Physics
J. Appl. Phys. 132, 034301 (2022)
https://doi.org/10.1063/5.0094185
Published: July 2022
View articletitled, Selective amorphization of SiGe in Si/SiGe nanostructures via high energy Si+ implant
Open the PDF for Selective amorphization of SiGe in Si/SiGe nanostructures via high energy Si+ implant in another window
Journal Articles

Tuning the feature size of nanoimprinting stamps: A method to enhance the flexibility of nanoimprint lithography

Open Access
Matthias Golibrzuch, Thomas L. Maier, Moritz J. Feil, Katharina Krischer, Markus Becherer
Journal: Journal of Applied Physics
J. Appl. Phys. 131, 124301 (2022)
https://doi.org/10.1063/5.0079282
Published: March 2022
View articletitled, Tuning the feature size of nanoimprinting stamps: A method to enhance the flexibility of nanoimprint lithography
Open the PDF for Tuning the feature size of nanoimprinting stamps: A method to enhance the flexibility of nanoimprint lithography in another window
Includes: Supplementary data
Journal Articles

Microellipsometry study of plasmonic properties of metal–insulator–metal structures with ordered lattices of nanoparticles

Available to Purchase
E. Bortchagovsky, Yu. Demydenko, A. Bogoslovskaya, J. Tang, F. Dai, M. Fleischer, I. Milekhin, A. Sharma, G. Salvan, D. R. T. Zahn
Journal: Journal of Applied Physics
J. Appl. Phys. 129, 123104 (2021)
https://doi.org/10.1063/5.0039164
Published: March 2021
View articletitled, Microellipsometry study of plasmonic properties of metal–insulator–metal structures with ordered lattices of nanoparticles
Open the PDF for Microellipsometry study of plasmonic properties of metal–insulator–metal structures with ordered lattices of nanoparticles in another window
Includes: Supplementary data
Journal Articles

Profilometry and stress analysis of suspended nanostructured thin films

Available to Purchase
Ali Akbar Darki, Alexios Parthenopoulos, Jens Vinge Nygaard, Aurélien Dantan
Journal: Journal of Applied Physics
J. Appl. Phys. 129, 065302 (2021)
https://doi.org/10.1063/5.0037406
Published: February 2021
View articletitled, Profilometry and stress analysis of suspended nanostructured thin films
Open the PDF for Profilometry and stress analysis of suspended nanostructured thin films in another window
Journal Articles

Method of full polarization control of microwave fields in a scalable transparent structure for spin manipulation

Open Access
Robert Staacke, Roger John, Max Kneiß, Christian Osterkamp, Séverine Diziain, Fedor Jelezko, Marius Grundmann, Jan Meijer
Journal: Journal of Applied Physics
J. Appl. Phys. 128, 194301 (2020)
https://doi.org/10.1063/5.0030262
Published: November 2020
View articletitled, Method of full polarization control of microwave fields in a scalable transparent structure for spin manipulation
Open the PDF for Method of full polarization control of microwave fields in a scalable transparent structure for spin manipulation in another window
Includes: Supplementary data
Journal Articles

Hybridization of plasmonic and dielectric metasurfaces with asymmetric absorption enhancement

Available to Purchase
Jhen-Hong Yang, Kuo-Ping Chen
Journal: Journal of Applied Physics
J. Appl. Phys. 128, 133101 (2020)
https://doi.org/10.1063/5.0019449
Published: October 2020
View articletitled, Hybridization of plasmonic and dielectric metasurfaces with asymmetric absorption enhancement
Open the PDF for Hybridization of plasmonic and dielectric metasurfaces with asymmetric absorption enhancement in another window
Journal Articles

Nanoantennas embedded in zinc oxide for second harmonic generation enhancement

Available to Purchase
Ruth Volmert, Nils Weber, Cedrik Meier
Journal: Journal of Applied Physics
J. Appl. Phys. 128, 043107 (2020)
https://doi.org/10.1063/5.0012813
Published: July 2020
View articletitled, Nanoantennas embedded in zinc oxide for second harmonic generation enhancement
Open the PDF for Nanoantennas embedded in zinc oxide for second harmonic generation enhancement in another window
Includes: Supplementary data
Journal Articles

Enhancement of Er luminescence in microdisk resonators made of Er,O-codoped GaAs

Available to Purchase
R. Higashi, M. Ogawa, J. Tatebayashi, N. Fujioka, D. Timmerman, S. Ichikawa, Y. Fujiwara
Journal: Journal of Applied Physics
J. Appl. Phys. 127, 233101 (2020)
https://doi.org/10.1063/1.5144159
Published: June 2020
View articletitled, Enhancement of Er luminescence in microdisk resonators made of Er,O-codoped GaAs
Open the PDF for Enhancement of Er luminescence in microdisk resonators made of Er,O-codoped GaAs in another window
Journal Articles

Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography

Available to Purchase
S. Kolatschek, S. Hepp, M. Sartison, M. Jetter, P. Michler, S. L. Portalupi
Journal: Journal of Applied Physics
J. Appl. Phys. 125, 045701 (2019)
https://doi.org/10.1063/1.5050344
Published: January 2019
View articletitled, Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography
Open the PDF for Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography in another window
Journal Articles

Deposition and patterning of magnetic atom trap lattices in FePt films with periods down to 200 nm

FeaturedScilightOpen Access
A. L. La Rooij, S. Couet, M. C. van der Krogt, A. Vantomme, K. Temst, R. J. C. Spreeuw
Journal: Journal of Applied Physics
J. Appl. Phys. 124, 044902 (2018)
https://doi.org/10.1063/1.5038165
Published: July 2018
View articletitled, Deposition and patterning of magnetic atom trap lattices in FePt films with periods down to 200 nm
Open the PDF for Deposition and patterning of magnetic atom trap lattices in FePt films with periods down to 200 nm in another window
Journal Articles

Nucleation sites of Ge nanoislands grown on pit-patterned Si substrate prepared by electron-beam lithography

Available to Purchase
Zh. V. Smagina, V. A. Zinovyev, S. A. Rudin, P. L. Novikov, E. E. Rodyakina, A. V. Dvurechenskii
Journal: Journal of Applied Physics
J. Appl. Phys. 123, 165302 (2018)
https://doi.org/10.1063/1.5009154
Published: April 2018
View articletitled, Nucleation sites of Ge nanoislands grown on pit-patterned Si substrate prepared by electron-beam lithography
Open the PDF for Nucleation sites of Ge nanoislands grown on pit-patterned Si substrate prepared by electron-beam lithography in another window
Journal Articles

Raman spectroscopy mapping of Si (001) surface strain induced by Ni patterned micro arrays

Available to Purchase
F. J. Rodríguez-Aranda, J. Méndez-Lozoya, F. J. González, A. G. Rodríguez
Journal: Journal of Applied Physics
J. Appl. Phys. 122, 125703 (2017)
https://doi.org/10.1063/1.4985817
Published: September 2017
View articletitled, Raman spectroscopy mapping of Si (001) surface strain induced by Ni patterned micro arrays
Open the PDF for Raman spectroscopy mapping of Si (001) surface strain induced by Ni patterned micro arrays in another window
Journal Articles

Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist

Available to Purchase
I. Charaev, T. Silbernagel, B. Bachowsky, A. Kuzmin, S. Doerner, K. Ilin, A. Semenov, D. Roditchev, D. Yu. Vodolazov, M. Siegel
Journal: Journal of Applied Physics
J. Appl. Phys. 122, 083901 (2017)
https://doi.org/10.1063/1.4986416
Published: August 2017
View articletitled, Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist
Open the PDF for Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist in another window
Journal Articles

Transport properties of exchange biased mesoscale wires

Available to Purchase
J. T. Delles, D. C. Harrison, Dan Endean, E. Dan Dahlberg
Journal: Journal of Applied Physics
J. Appl. Phys. 121, 053905 (2017)
https://doi.org/10.1063/1.4975343
Published: February 2017
View articletitled, Transport properties of exchange biased mesoscale wires
Open the PDF for Transport properties of exchange biased mesoscale wires in another window