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Journal Articles

Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance

J. Mouro, V. Chu, J. P. Conde

J. Appl. Phys. 119, 154501 (2016)

https://doi.org/10.1063/1.4946040

Published: April 2016

View articletitled, Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance

Journal Articles

Pressure sensor based on magnetic tunnel junctions

D. Meyners, T. von Hofe, M. Vieth, M. Rührig, S. Schmitt, E. Quandt

J. Appl. Phys. 105, 07C914 (2009)

https://doi.org/10.1063/1.3063662

Published: February 2009

View articletitled, Pressure sensor based on magnetic tunnel junctions

Journal Articles

Design and fabrication of a gold electroplated electromagnetic and electrostatic hybrid MEMS relay

Shan Guan, Karl Vollmers, Arunkumar Subramanian, Bradley J. Nelson

J. Appl. Phys. 97, 10R506 (2005)

https://doi.org/10.1063/1.1854271

Published: May 2005

View articletitled, Design and fabrication of a gold electroplated electromagnetic and electrostatic hybrid MEMS relay

Journal Articles

Electrostatically actuated thin-film amorphous silicon microbridge resonators

J. Gaspar, V. Chu, J. P. Conde

J. Appl. Phys. 97, 094501 (2005)

https://doi.org/10.1063/1.1877820

Published: April 2005

View articletitled, Electrostatically actuated thin-film amorphous silicon microbridge resonators