Chemical and structural investigations of the interactions of Cu with MnSiO3 diffusion barrier layers

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Chemical and structural investigations of the interactions of Cu with MnSiO₃ diffusion barrier layers

J. Appl. Phys. 112, 064507 (2012)

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Chemical and structural investigations of the interactions of Cu with MnSiO₃ diffusion barrier layers

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Chemical and structural investigations of the interactions of Cu with MnSiO₃ diffusion barrier layers