Skip to Main Content
Skip Nav Destination

Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique

J. Appl. Phys. 133, 065302 (2023)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Ryosuke Kizu
  • Ichiko Misumi
  • Akiko Hirai
  • Satoshi Gonda
Journal of Micro/Nanopatterning, Materials, and Metrology (2023) 22 (04)
Close Modal

or Create an Account

Close Modal
Close Modal