Microstructural analysis in the depth direction of a heteroepitaxial AlN thick film grown on a trench-patterned template by nanobeam X-ray diffraction | Citedby Results | Journal of Applied Physics | AIP Publishing

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Microstructural analysis in the depth direction of a heteroepitaxial AlN thick film grown on a trench-patterned template by nanobeam X-ray diffraction

J. Appl. Phys. 123, 161563 (2018)

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