Skip to Main Content
Skip Nav Destination

Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current

J. Appl. Phys. 91, 5604–5613 (2002)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • A Ganguli
  • G Veda Prakash
  • Satyananda Kar
  • Debaprasad Sahu
Physica Scripta 98, 105011 (2023)
  • Lei Wang
  • Constantinos Lazarou
  • Charalambos Anastassiou
  • George E Georghiou
  • Christophe Leys
  • Anton Nikiforov
Plasma Sources Science and Technology 30, 075029 (2021)
  • Arti Rawat
  • A. Ganguli
  • Ramesh Narayanan
  • R. D. Tarey
Review of Scientific Instruments (2020) 91 (9)
  • Yohei Yamazawa
Plasma Sources Science and Technology 24, 034015 (2015)
  • Emmanuel F. C. Chimamkpam
  • Ella S. Field
  • Akintunde Ibitayo Akinwande
  • Luis Fernando Velasquez-Garcia
Journal of Microelectromechanical Systems 23, 1131 (2014)
  • Z Donkó
  • J Schulze
  • U Czarnetzki
  • A Derzsi
  • P Hartmann
  • I Korolov
  • E Schüngel
Plasma Physics and Controlled Fusion 54, 124003 (2012)
  • Ralf Peter Brinkmann
Journal of Physics D: Applied Physics 42, 194009 (2009)
  • Yohei Yamazawa
  • Michiko Nakaya
  • Manabu Iwata
  • Akitaka Shimizu
Japanese Journal of Applied Physics 46, 7453 (2007)
Close Modal

or Create an Account

Close Modal
Close Modal