Damage of silicon induced in low‐energy CF4 discharges | Citedby Results | Journal of Applied Physics | AIP Publishing

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Damage of silicon induced in low‐energy CF₄ discharges

J. Appl. Phys. 64, 1589–1590 (1988)

This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.

A non-destructive measurement on the damage of silicon induced by a 30 eV Ar magnetron discharge

F Y Chen
Y H Liou

Semiconductor Science and Technology 4, 518 (1989)

Damage of silicon in low-energy Ar discharge studied by photoinduced modulation absorption

F. Y. Chen

Journal of Applied Physics 66, 973 (1989)