Electron inelastic mean free path (IMFP) is an important parameter for surface chemical quantification by surface electron spectroscopy techniques. It can be obtained from analysis of elastic peak electron spectroscopy (EPES) spectra measured on samples and a Monte Carlo simulation method. To obtain IMFP parameters with high accuracy, the surface excitation effect on the measured EPES spectra has to be quantified as a surface excitation parameter (SEP), which can be calculated via a dielectric response theory. However, such calculated SEP does not include influence of elastic scattering of electrons inside samples during their incidence and emission processes, which should not be neglected simply in determining IMFP by an EPES method. In this work a Monte Carlo simulation method is employed to determine surface excitation parameter by taking account of the elastic scattering effect. The simulated SEPs for different primary energies are found to be in good agreement with the experiments particularly for larger incident or emission angles above 60° where the elastic scattering effect plays a more important role than those in smaller incident or emission angles. Based on these new SEPs, the IMFP measurement by EPES technique can provide more accurate data.
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February 2017
Research Article|
February 27 2017
Calculation of Surface Excitation Parameters by a Monte Carlo Method
Zhe Zheng;
Zhe Zheng
aCAS Key Laboratory of Geospace Environment, Department of Modern Physics,
University of Science and Technology of China
, Hefei 230026, China
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Bo Da;
Bo Da
b
National Institute for Materials Science
, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
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Shi-feng Mao;
Shi-feng Mao
cSchool of Nuclear Science and Technology,
University of Science and Technology of China
, Hefei 230026, China
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Ze-jun Ding
Ze-jun Ding
*
dHefei National Laboratory for Physical Sciences at the Microscale and Department of Physics,
University of Science and Technology of China
, Hefei 230026, China
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Zhe Zheng
1
Bo Da
2
Shi-feng Mao
3
Ze-jun Ding
4,*
a
CAS Key Laboratory of Geospace Environment, Department of Modern Physics,
University of Science and Technology of China
, Hefei 230026, China
b
National Institute for Materials Science
, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
c
School of Nuclear Science and Technology,
University of Science and Technology of China
, Hefei 230026, China
d
Hefei National Laboratory for Physical Sciences at the Microscale and Department of Physics,
University of Science and Technology of China
, Hefei 230026, China
*
Author to whom correspondence should be addressed. E-mail: [email protected]
Chin. J. Chem. Phys. 30, 83–89 (2017)
Article history
Received:
July 23 2016
Accepted:
September 17 2016
Citation
Zhe Zheng, Bo Da, Shi-feng Mao, Ze-jun Ding; Calculation of Surface Excitation Parameters by a Monte Carlo Method. Chin. J. Chem. Phys. 27 February 2017; 30 (1): 83–89. https://doi.org/10.1063/1674-0068/30/cjcp1607146
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