Piezoelectric Thin Films for MEMS
Recently, piezoelectric thin films have attracted considerable attention as one of the new key technologies for IoT related MEMS devices. These research results have also stimulated a wide range of related technologies concerning piezoelectric MEMS such as material science, deposition and measurement methods, device design, and micro-fabrication of piezoelectric MEMS devices. These technologies are based on the close relationship between academia and industries and the common goal is to contribute to society by creating new functional devices using piezoelectric thin films. This APL special topic provides a platform to examine emerging piezoelectric thin films and devices.
Guest Editors: Isaku Kanno, Barbara Mali?Â, Jun Akedo, Paul Muralt, Jun Ouyang, and Takeshi Yoshimura
