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13th International Conference of the Chinese Society of Micro and Nanotechnology (CSMNT2022)
The 13th International Conference of the Chinese Society of Micro and Nanotechnology (CSMNT2022) was held in November 2022 in Harbin, China. The theme of CSMNT2022 is "Micro/Nano science and technology chips create the future," which focuses on frontier areas such as high-end chips, micro-/nanosensors, intelligent micro-systems, artificial intelligence, aerospace, intelligent information, new materials, and bio-medicine. The articles below are the papers published from this conference.
Guest Editor: Fei Tang, Tsinghua University

REGULAR ARTICLES
Hai Wang; Hang Sun; Zihao Zhang; Ye Tang; Chunlai Yang; Henian Li
10.1063/5.0151151
REGULAR ARTICLES
Nuo Wang; Lei Li; Yulong Chen; Hongyu Wang; Zheming Yang; Dingyu Long
10.1063/5.0138920
REGULAR ARTICLES
Yingqi Shang; Hongquan Zhang; Weiwei Liu; Dongsa Chen; Shuangyu Wu; Zuofei Wu
10.1063/5.0132910
EDITORIALS
Wenhui Duan
10.1063/5.0147926
REGULAR ARTICLES
Hai Wang; Zihao Zhang; Hang Sun; Henian Li; Ye Tang; Chunlai Yang
10.1063/5.0141291
REGULAR ARTICLES
Ruirui Wu; Huaijiang Li; Lei Gao
10.1063/5.0135401
REGULAR ARTICLES
Gaohua Wu; Yiling Yang; Cunyao Li; Yuguo Cui; Yanding Wei
10.1063/5.0132217
REGULAR ARTICLES
Hao Sheng; Kun Cheng; Xiaokang Jin; Tian Han; Xiaolin Jiang; Changchun Dong
10.1063/5.0140530
REGULAR ARTICLES
Jiang Wu; Xiaomei Zheng; Yuguang Lv; Yanjie Li; Guoliang Zhang
10.1063/5.0137874
REGULAR ARTICLES
Hui Li; Jianjun Luo; Wei Ren; Chunyang Feng; Yingke Chang; Jiao Li
10.1063/5.0135576
REGULAR ARTICLES
Wei Liu; Xiao-ming Ren; Rui-zhen Xie; Lan Liu; Ke-xin Yu; Xiang-fei Ji; Wei Ren; En-yi Chu
10.1063/5.0137883
Lan Liu; Ke-Xin Yu; Yue-Wei Ding; Xiao-Ming Ren; Jing-Xin Zhang; Mi Zhou; Wei Liu; Hong-Zhi Yao; Wei Ren
10.1063/5.0135398
REGULAR ARTICLES
Yanbo Chen; Qiong Nie; Chaowei Zhong; Jiayi Song; Yinfeng Huang; Chengkai Lin; Qiming Zeng; Jie Cao; Yan Xue
10.1063/5.0138835
REGULAR ARTICLES
Yidi Zhang; Xin Zhao; Yaowei Liu
10.1063/5.0133456
REGULAR ARTICLES
Yulong Chen; Lei Li; Nuo Wang; Hongyu Wang; Zheming Yang; Dingyu Long
10.1063/5.0135672
REGULAR ARTICLES
Zhengang Zhao; Jiankun Wang; Qingchan Liu; Ziteng Wang; Jiahong Zhang
10.1063/5.0134238
REGULAR ARTICLES
Yan Lang; Huili Liu; Chunbin Zhang; Kuilin Lv
10.1063/5.0135420
REGULAR ARTICLES
Zhengang Zhao; Lei Li; Yuyuan Wang; Yaxin Wang; Yueyao Hui
10.1063/5.0134402
REGULAR ARTICLES
Guohong Peng; Zhikun Zhang; Yaxin Wang; Yanhui Zhang; Zhengang Zhao
10.1063/5.0134229
REGULAR ARTICLES
Yuanze Xu; He Lin; Futing Yi; Jing Liu
10.1063/5.0135532