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Papers from the 67th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2024)

This collection includes papers from the 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held from May 28 - 31, 2024 in La Jolla, CA. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was Aimee Bross Price (The Ohio State University), and the Program Chair was Wei Wu (University of Southern California).

Guest Editor: Program Chair: Wei Wu, University of Southern California

Lithography

Fluorescent flow analysis of in situ material exchange in two-photon 3D printing

Pratyaksh Yemulwar; Fatemeh Rajabasadi; Tanya Saxena; Man-Ho Wong; Josua Zscheile; Robert Kirchner

https://doi.org/10.1116/6.0004114

Measurement and Characterization

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Delong Chen; Qingmao Zhang; Zhuming Liu

https://doi.org/10.1116/6.0004025

Lithography

Fabrication of microstructures on porous nanolattices

Nayoung Kim; Saurav Mohanty; Vijay Anirudh Premnath; Ethan Flores; Chih-Hao Chang

https://doi.org/10.1116/6.0004054

Electronic and Optoelectronic Materials, Devices and Processing

Photoluminescence lifetime of perovskites on modified substrates

Xavier Vorhies; Jessica M. Andriolo; Joseph J. Thiebes; Emma K. Orcutt; Erik M. Grumstrup; Jack L. Skinner

https://doi.org/10.1116/6.0004115

Nanoscale Science and Technology

Focused helium ion beam nanofabrication by near-surface swelling

Sherry Mo; Dana O. Byrne; Frances I. Allen

https://doi.org/10.1116/6.0004100

Nanoscale Science and Technology

Machine learning driven measurement of high-aspect-ratio nanostructures using Mueller matrix spectroscopic ellipsometry

Shiva Mudide; Nick Keller; G. Andrew Antonelli; Geraldina Cruz; Julia Hart; Alexander R. Bruccoleri; Ralf K. Heilmann; Mark L. Schattenburg

https://doi.org/10.1116/6.0004058

Vacuum Measurement and Technology

Filtering the beam from an ionic liquid ion source

Alexander C. G. Storey; Aydin Sabouri; Rohit Khanna; Usama Ahmed; Carla Sofia Perez-Martinez

https://doi.org/10.1116/6.0004029

Electronic and Optoelectronic Materials, Devices and Processing

Fabricating distributed feedback laser gratings with bismuth and gold focused ion beams

B. Salmond; D. D. John; W. J. Mitchell; B. J. Thibeault; T. Richter; A. Nadzeyka; P. Mazarov; F. Meyer; J. Fridmann; Y. Yu; M. Wale; W. Meredith; P. M. Smowton; D. Read; S. Shutts

https://doi.org/10.1116/6.0004056

Electronic and Optoelectronic Materials, Devices and Processing