Reliability and Stress-related Phenomena in Nano and Microelectronics

This Collection is a collaboration with the 16th International Conference on Reliability and Stress-related Phenomena in Nano and Microelectronics (16th IRSP) which was held November 4–6, 2019 in San Jose, CA. The Conference Chair was Dr. Valeriy Sukharev and the Vice Chair was Dr. Ehrenfried Zschech. While a significant number of articles are from material presented at the 16th IRSP, research articles that are on this topic but not presented at this conference are also included. This Collection features articles dedicated to the science and technology of reliability and stress-related phenomena in nano and microelectronics.

Guest Editors: Valeriy Sukharev, Paul S. Ho, Ehrenfried Zschech, Farid N. Najm, and Hiu-Yung Wong

Image credit: Fei Ding, Hiu-Yung Wong, and Tsu-Jae King Liu, JVST B 39 (1) 013201 (2021), https://doi.org/10.1116/6.0000675.