Plasma Processing for Advanced Microelectronics

Plasma processing is a critical tool for the microelectronics industry, whose products and systems enable technologies across a wide range of economic sectors, with plasmas used in 40–45% of the fabrication steps in leading microchip manufacturing. Such utilization requires a thorough understanding of the plasma environment and plasma–surface interactions. This Special Topic Collection on Plasma Processing for Advanced Microelectronics features articles dedicated to the science and technology of plasma processing associated with enhanced material and device performance, the development of novel materials and device architectures, and process control and development in semiconductor, memory and novel or advanced electronic device fabrication.

Guest Editors: Sebastian Engelmann (IBM), Keren Kanarik (Lam Research Corporation), and Scott Walton (Naval Research Laboratory)

Image Credit: Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Masaru Izawa, Kenji Ishikawa, and Masaru Hori, JVST B 40, 022201 (2022); https://doi.org/10.1116/6.0001660