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Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)
This Special Topic Collection features articles on most recent developments and experimental studies in Secondary Ion Mass Spectrometry (SIMS). The collection includes papers presented at the SIMS 22 Conference held in Miyako Messe, Kyoto, Japan, October 20-25, 2019 as well as other SIMS research articles that were not presented at this conference but submitted to the call for the special collection.
Image credit: Chuanzhen Zhou, Fred Stevie and Roberto Garcia, JVST B 38, 034006 (2020); https://doi.org/10.1116/1.5141467

Microelectronic and Nanoelectronic Devices
Improvement of extra low impact energy SIMS data reduction algorithm for process control
Available to Purchase
Alexandre Merkulov; Paula Peres; Kilian Soulard; David John Larson; Karthik Sivaramakrishnan
Measurement and Characterization
Enhanced sputter and secondary ion yields using MeV gold nanoparticle beams delivered by the Andromede facility
Available to Purchase
Thanh Loan Lai; Dominique Jacquet; Isabelle Ribaud; Michael John Eller; Dmitriy Verkhoturov; Emile Albert Schweikert; Luiz Henrique Galvão Tizei; Fuhui Shao; Suheyla Bilgen; Bruno Mercier; Gael Sattonnay; Serge Della Negra
Measurement and Characterization
Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions
Available to Purchase
Naofumi Nishida; Makoto Sakurai; Daiji Kato; Hiroyuki A. Sakaue
Measurement and Characterization
Calibration of matrix-dependent biases in isotope and trace element analyses of carbonate minerals
Available to Purchase
Kaitlyn A. McCain; Ming-Chang Liu; Kevin D. McKeegan
Measurement and Characterization
Ionization probability of sputtered indium atoms under impact of slow highly charged ions
Available to Purchase
Matthias Herder; Philipp Ernst; Lucia Skopinski; Boris Weidtmann; Marika Schleberger; Andreas Wucher
Measurement and Characterization
Analysis of useful ion yield for Si in GaN by secondary ion mass spectrometry
Available to Purchase
M. K. Indika Senevirathna; Mark Vernon; Graham A. Cooke; Garnett B. Cross; Alexander Kozhanov; Michael D. Williams
Measurement and Characterization
Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr
Available to Purchase
Yue Zhao; Takeru Yoshida; Yuzuka Ohmori; Yuta Miyashita; Masato Morita; Tetsuo Sakamoto; Kotaro Kato; Ryohei Terabayashi; Volker Sonnenschein; Hideki Tomita; Toshihide Kawai; Takeo Okumura; Yukihiko Satou; Masabumi Miyabe; Ikuo Wakaida
Nanometer Science and Technology
Bismuth adducted intact molecular ions [M + Bi]+ under low-energy bismuth cluster ion beams
Available to Purchase
Takuya Miyayama; Shin-ichi Iida
Measurement and Characterization
Analysis of useful ion yield for the Mg dopant in GaN by quadrupole—SIMS
Available to Purchase
M. K. Indika Senevirathna; Michael D. Williams; Graham A. Cooke; Alexander Kozhanov; Mark Vernon; Garnett B. Cross
Measurement and Characterization
Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions
Available to Purchase
Toshio Seki; Kenta Ishii; Takaaki Aoki; Jiro Matsuo
Measurement and Characterization
Wider vision capability provided by a curved surface sample holder for TOF-SIMS imaging
Available to Purchase
Shin-ichi Iida; Hsun-Yun Chang; Gregory L. Fisher; Takuya Miyayama; Ibuki Tanaka
Measurement and Characterization
Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers
Available to Purchase
Reiko Saito; Haruko Akutsu; Jun Asakawa; Yue Zhao; Kei Kiyokawa; Masato Morita; Tetsuo Sakamoto; Masaaki Fujii
Measurement and Characterization
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection
Available to Purchase
Siegfried Hofmann; Pavel Lejcek; Gang Zhou; Hao Yang; SongYou Lian; Janez Kovac; JiangYong Wang
Measurement and Characterization
Comparison of quantitative analyses using SIMS, atom probe tomography, and femtosecond laser ablation inductively coupled plasma mass spectrometry with Si1−XGeX and Fe1−X NiX binary alloys
Available to Purchase
Yun Jung Jang; Seon Hee Kim; Kyung Joong Kim; Donghwan Kim; Yeonhee Lee
Measurement and Characterization
Absorption, discharge, and internal partitioning behavior of hydrogen in the tantalum and tantalum oxide system investigated by in situ oxidation SIMS and ab initio calculations
Available to Purchase
Tsutomu Asakawa; Daisuke Nagano; Hiromu Miyazawa; Ian Clark
Measurement and Characterization
Analysis of permethrin treated fabric using ToF-SIMS
Available to Purchase
Chuanzhen Zhou; Fred Stevie; Roberto Garcia
Measurement and Characterization
Fusion data analysis of imaging data of hydrogen-permeated steel obtained by complementary methods
Open Access
Tomomi Akiyama; Naoya Miyauchi; Akiko N. Itakura; Takayuki Yamagishi; Satoka Aoyagi
Nanometer Science and Technology
ToF-SIMS study of selective anchoring of Ru(tpy)2 complexes on zirconium-phosphate functionalized oxide surfaces
Available to Purchase
Stefania Vitale; Baptiste Laramée-Milette; Andrea Valenti; Maria Emanuela Amato; Garry S. Hanan; Nunzio Tuccitto; Antonino Licciardello
Measurement and Characterization
Structural analysis of organic ultrathin-layer by using Ar-gas-cluster ion beam sputter collecting method
Available to Purchase
Hiroyuki Noda; Yoshiteru Sasaki; Daigo Murai; Masaki Hachiya
Measurement and Characterization
Effects of polymer crystallization on the molecular sensitivity in TOF-SIMS measurements using Bi1+ and Bi32+ ions
Available to Purchase
Rie Shishido; Masaya Mitsuishi; Shigeru Suzuki