Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)

This is a collection of papers originating from the 15th International Symposium on Sputtering and Plasma Processes (ISSP2019) meeting held June 11–14, 2019 in Kanazawa, Japan. Topics include fundamentals of sputtering and plasma processes, thin films, and applications.

Image Credit: Philipp Schulz, Andreas Pflug, and Hans-Ulrich Kricheldorf, JVST B 38(2), https://doi.org/10.1116/1.5130720 (2020).