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Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades
This Special Collection honors Dr. Gary McGuire, the Editor of the Journal of Vacuum Science & Technology B between 1991 and 2011 and Associate Editor of the Journal of Vacuum Science & Technology A & B between 2011 and 2020.
The collection focuses on important challenges, new developments, and current understanding of various topics that Gary McGuire influenced and contributed to. The collection caters to both scientists and professionals in industry and academia and connects fundamental research with practical applications.
Guest Editors:
Susan Burkett, University of Alabama
Olga Shenderova, Adamas Nanotechnologies, Inc.

Preface
Olga Shenderova; Susan Burkett
Nanoscale Science and Technology
A. R. Chourasia; D. R. Chopra
Perspectives
Irit Rosenhek-Goldian; David Cahen; Sidney R. Cohen
Nanoscale Science and Technology
Sadie M. Flagg; Sarah E. Colbert; Sarah S. Jiudice; Erik S. Peterson; Brian H. Augustine
Electronic and Optoelectronic Materials, Devices and Processing
J. K. L. Peters; G. D. Ashby; H. D. Hallen
Electronic and Optoelectronic Materials, Devices and Processing
Nicholas Nunn; Sergey Milikisiyants; Marco D. Torelli; Richard Monge; Tom Delord; Alexander I. Shames; Carlos A. Meriles; Ashok Ajoy; Alex I. Smirnov; Olga A. Shenderova
Nanoscale Science and Technology
Oleg S. Kudryavtsev; Alexey M. Romshin; Dmitrii G. Pasternak; Igor I. Vlasov
Measurement and Characterization
Long V. Le; Jeroen A. Deijkers; Young D. Kim; Haydn N. G. Wadley; David E. Aspnes
Electronic and Optoelectronic Materials, Devices and Processing
Elizabeth V. Favela; Hyung Min Jeon; Kevin D. Leedy; Kun Zhang; Szu-Wei Tung; Francelia Sanchez Escobar; C. V. Ramana; Lisa M. Porter
Electronic and Optoelectronic Materials, Devices and Processing
Ernest M. Walker, III; Ako Emanuel; Hans D. Hallen
Review Articles
S. J. Pearton; Xinyi Xia; Fan Ren; Md Abu Jafar Rasel; Sergei Stepanoff; Nahid Al-Mamun; Aman Haque; Douglas E. Wolfe
Review Articles
Ciro Falcony; Denise Estrada-Wiese; Jessica De Anda; Oscar Pérez-Díaz; Mariano Aceves-Mijares
Electronic and Optoelectronic Materials, Devices and Processing
Yukun Liu; Minh N. Tran; Iver J. Cleveland; Eray S. Aydil
Electronic and Optoelectronic Materials, Devices and Processing
Boitumelo C. Tladi; Hendrik C. Swart; Robin E. Kroon
Electronic and Optoelectronic Materials, Devices and Processing
Melissa Rivero Arias; Carlos A. Armenta; Carola Emminger; Cesy M. Zamarripa; Nuwanjula S. Samarasingha; Jaden R. Love; Sonam Yadav; Stefan Zollner
Measurement and Characterization
Mubarak Y. A. Yagoub; Hendrik C. Swart; Elizabeth Coetsee
Electronic and Optoelectronic Materials, Devices and Processing
Chao-Ching Chiang; Chan-Wen Chiu; Fan Ren; Cheng-Tse Tsai; Yu-Te Liao; Josephine F. Esquivel-Upshaw; Stephen J. Pearton
Microelectronic and Nanoelectronic Devices
Minghan Xian; Jenna L. Stephany; Chan-Wen Chiu; Chao-Ching Chiang; Fan Ren; Cheng-Tse Tsai; Siang-Sin Shan; Yu-Te Liao; Josephine F. Esquivel-Upshaw; Stephen J. Pearton