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Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)
This collection includes papers from the 65th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held from May 31 – June 3, 2022 in New Orleans, Louisiana. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was James Spallas (KLA), and the Program Chair was B. Robert Ilic (National Institute of Standards and Technology).
Guest Editor: Program Chair: B. Robert Ilic