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Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)
This collection includes papers from the 65th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held from May 31 – June 3, 2022 in New Orleans, Louisiana. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was James Spallas (KLA), and the Program Chair was B. Robert Ilic (National Institute of Standards and Technology).
Guest Editor: Program Chair: B. Robert Ilic

Nanoscale Science and Technology
Karla Moyano; Carlos Reinoso; Steven Núñez; Beatriz Pérez; Cristian Santacruz; César Costa; Esteban Irribarra
10.1116/6.0002123
Electronic and Optoelectronic Materials, Devices and Processing
Haseeb Ahmed; Min Wu; Maria Stepanova
10.1116/6.0002108
Nanoscale Science and Technology
Rahman Sabahi-Kaviani; Daan van Boekel; Regina Luttge
10.1116/6.0002291
Lithography
Deepak Kumar; Krishnaroop Chaudhuri; Joseph W. Brill; Jonathan T. Pham; J. Todd Hastings
10.1116/6.0002118
Nanoscale Science and Technology
Kaustubh Vyas; Kashif M. Awan; Ksenia Dolgaleva
10.1116/6.0002167
Lithography
Chen Tang; Atsushi Sekiguchi; Yosuke Ohta; Yoshihiko Hirai; Masaaki Yasuda
10.1116/6.0002128
Lithography
Henock Demessie Yallew; Jana Jágerská; Martin M. Greve
10.1116/6.0002187
MEMS and NEMS
Animesh Nanaware; Taylor Kranbuhl; Jesus Ching; Janice S. Chen; Xinye Chen; Qingsong Tu; Ke Du
10.1116/6.0002107
Lithography
Leonidas E. Ocola; James Bucchignano; Simon Dawes; Andrei Fustochenko
10.1116/6.0002121
Microelectronic and Nanoelectronic Devices
Fumi Nakamura; Kenta Suzuki; Akihiro Noriki; Takeru Amano
10.1116/6.0002119
Lithography
R. Dawant; S. Ecoffey; D. Drouin
10.1116/6.0002116
Vacuum Measurement and Technology
Daiki Sato; Haruka Shikano; Atsushi Koizumi; Tomohiro Nishitani
10.1116/6.0002122
Vacuum Measurement and Technology
Tomohiro Nishitani; Yuta Arakawa; Shotaro Noda; Atsushi Koizumi; Daiki Sato; Haruka Shikano; Hokuto Iijima; Yoshio Honda; Hiroshi Amano
10.1116/6.0002111
Nanoscale Science and Technology
Vijay Anirudh Premnath; I.-Te Chen; Kun-Chieh Chien; Chih-Hao Chang
10.1116/6.0002112
Electronic and Optoelectronic Materials, Devices and Processing
Atsushi Koizumi; Daiki Sato; Haruka Shikano; Hokuto Iijima; Tomohiro Nishitani
10.1116/6.0002124
Nanoscale Science and Technology
Kun-Chieh Chien; Chih-Hao Chang
10.1116/6.0002109
Nanoscale Science and Technology
M. Chen; X. Ding; L. Que; X. Liang
10.1116/6.0002071
Lithography
Jacques Gierak; Gilles Raynaud; Caroline Guiziou; Jean René Coudevylle; Ali Madouri; Lars Bruchhaus; Achim Nadzeyka; Björn Whittman; Ralf Jede; Christophe David; Jean Christophe Girard
10.1116/6.0002104