Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2020

This collection includes papers that were planned to be presented at EIPBN 2020. The international EIPBN conference is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. The Conference Chair was James Spallas (KLA), and the Program Chair was B. Robert Ilic (National Institute of Standards and Technology).

Conference Chair: James Spallas, Program Chair: B. Robert Ilic