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Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)
This collection includes papers from the 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication held in Minneapolis, Minnesota, from May 28-31, 2019. The EIPBN Conference is dedicated to lithographic patterning science, nano-manufacturing process technology, and the applications these methods enable. The Conference Chair was Aaron Stein, (Brookhaven National Laboratory) and the Program Chair was Regina Luttge (Eindhoven University of Technology).
Guest Editor: Program Chair, Regina Luttge