Papers from the 14th International Symposium on Sputtering and Plasma Processes

This collection includes papers from the 14th International Symposium on Sputtering and Plasma Processes, held in Kanazawa, Japan from July 5-7, 2017. The Chairman was Yasusei Yamada (National Institute of Advanced Industrial Science and Technology (AIST)), and the Co-chairs were Tetsuya Goto (Tohoku University) and Yasuhito Gotoh (Kyoto University).

Image Credits: Alexander P. Palov, Tatyana V. Rakhimova, Ekaterina N. Voronina, and Yuri A. Mankelevich, Journal of Vacuum Science & Technology A 36, 02C103 (2018); https://doi.org/10.1116/1.5003890