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Atomic Layer Deposition (ALD)

Each year, in concert with the annual AVS International Conference on Atomic Layer Deposition (ALD), the Journal of Vacuum Science and Technology A publishes a collection of articles covering the most recent developments and experimental studies in ALD. The collection includes papers presented at the ALD 2022 meeting held on June 26-29, 2022 in Ghent, Belgium, as well as other ALD research articles that were not presented at the conference but were submitted to the collection. The collection features articles dedicated to the science and technology of atomic layer controlled deposition.

Image credit: Zecheng Wu, Yu Zhang, Shiqiang Lu, Rongxu Bai, Na Gao, Kai Huang, Hao Zhu, Shen Hu, Qingqing Sun, David Wei Zhang, Xingwei Ding, Jack C. Lee, and Li Ji, JVST A 40, 042402 (2022).

Special Collection Image
Jan-Willem J. Clerix; Golnaz Dianat; Annelies Delabie; Gregory N. Parsons
Stephan Prünte; Gerben van Straaten; Dries van Eyck; Oscar Diaz-Morales; Jeroen Van Dijck; Hans de Neve; Mariadriana Creatore
Xin Yang; Himamshu Nallan; Brennan M. Coffey; John G. Ekerdt
Clémence Badie; Héloïse Tissot; Beniamino Sciacca; Maïssa K. Barr; Julien Bachmann; Christophe Vallée; Gaël Gautier; Thomas Defforge; Vincent Astie; Jean-Manuel Decams; Mikhael Bechelany; Lionel Santinacci
Atilla C. Varga; Seán T. Barry
Karl Rönnby; Henrik Pedersen; Lars Ojamäe
Gabriel Bartholazzi; M. M. Shehata; Daniel H. Macdonald; Lachlan E. Black
Heta-Elisa Nieminen; Mykhailo Chundak; Mikko J. Heikkilä; Paloma Ruiz Kärkkäinen; Marko Vehkamäki; Matti Putkonen; Mikko Ritala
Kamesh Mullapudi; Konner E. K. Holden; Jessica L. Peterson; Charles L. Dezelah; Daniel F. Moser; Ravindra K. Kanjolia; Douglas J. Tweet; John F. Conley, Jr
Michael A. Land; Dexter A. Dimova; Katherine N. Robertson; Seán T. Barry
Hardik Jain; Mariadriana Creatore; Paul Poodt
Tsu-Ting Lee; Kashi Chiranjeevulu; Sireesha Pedaballi; Daire Cott; Annelies Delabie; Chang-Fu Dee; Edward Yi Chang
Oili M. E. Ylivaara; Andreas Langner; Satu Ek; Jari Malm; Jaakko Julin; Mikko Laitinen; Saima Ali; Sakari Sintonen; Harri Lipsanen; Timo Sajavaara; Riikka L. Puurunen
Poorani Gnanasambandan; Noureddine Adjeroud; Renaud Leturcq
Byunguk Kim; Sangmin Lee; Taesung Kang; Sunghoon Kim; Sangman Koo; Hyeongtag Jeon
K. Saito; K. Yoshida; M. Miura; K. Kanomata; B. Ahmmad; S. Kubota; F. Hirose
Chih-Wei Hsu; Ivan Martinovic; Roger Magnusson; Babak Bakhit; Justinas Palisaitis; Per. O. Å. Persson; Polla Rouf; Henrik Pedersen
Angel Yanguas-Gil; Jeffrey W. Elam
M. A. Mione; V. Vandalon; W. M. M. Kessels; F. Roozeboom
Himamshu C. Nallan; Xin Yang; Brennan M. Coffey; John G. Ekerdt
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