Atomic Layer Deposition (ALD)

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting, the Journal of Vacuum Science and Technology A publishes a collection of articles covering the most recent developments and experimental studies in ALD. This ALD Special Topic Collection includes papers presented at the ALD 2021 conferences held virtually on June 27-30, 2021, as well as other ALD research articles that were not presented at the conference but were submitted to the call for the special collection. The Collection features articles dedicated to the science and technology of atomic layer controlled deposition.

Image credit: Antony Premkumar Peter et al., JVST A 39(4), 10.1116/6.0000821 (2021).