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2019 Special Collection on Atomic Layer Deposition (ALD)

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting, the Journal of Vacuum Science and Technology A, publishes a large group of papers covering the most recent developments and experimental studies in ALD. This ALD Special Topic Collection was planned in collaboration with ALD 2018 and the ALE 2018 Workshop held in Incheon, South Korea from July 29–August 1, 2018. The Collection features articles dedicated to the science and technology of atomic layer controlled deposition. Articles in this Collection include papers originating from talks presented at ALD 2018 as well as other ALD research articles that were not presented at this conference.

Image credit: Jeffrey M. Woodward, Samantha G. Rosenberg, Alexander C. Kozen, Neeraj Nepal, Scooter D. Johnson, Christa Wagenbach, Andrew H. Rowley, Zachary R. Robinson, Howie Joress, Karl F. Ludwig Jr., and Charles R. Eddy Jr., Journal of Vacuum Science & Technology A 37, 030901 (2019); [2]

Special Collection Image
Ling Ju; Vamseedhara Vemuri; Nicholas C. Strandwitz
Karsten Arts; Vincent Vandalon; Riikka L. Puurunen; Mikko Utriainen; Feng Gao; Wilhelmus M. M. (Erwin) Kessels; Harm C. M. Knoops
Yifan Nie; Ravi Agarwal; Sumeet C. Pandey; Gurtej S. Sandhu
Taro Saito; Ryuta Iba; Shotaro Ono; Go Imada; Kanji Yasui
Tae-Eun Song; Seho Lee; Hee Han; Soonyoung Jung; Soo-Hyun Kim; Min Jun Kim; Seung Wook Lee; Chi Won Ahn
Harm C. M. Knoops; Tahsin Faraz; Karsten Arts; Wilhelmus M. M. (Erwin) Kessels
Jeffrey M. Woodward; Samantha G. Rosenberg; Alexander C. Kozen; Neeraj Nepal; Scooter D. Johnson; Christa Wagenbach; Andrew H. Rowley; Zachary R. Robinson; Howie Joress; Karl F. Ludwig, Jr.; Charles R. Eddy, Jr.
Miia Mäntymäki; Elisa Atosuo; Mikko J. Heikkilä; Marko Vehkamäki; Miika Mattinen; Kenichiro Mizohata; Jyrki Räisänen; Mikko Ritala; Markku Leskelä
Samantha G. Rosenberg; Christa Wagenbach; Virginia R. Anderson; Scooter D. Johnson; Neeraj Nepal; Alexander C. Kozen; Jeffrey M. Woodward; Zachary R. Robinson; Max Munger; Howie Joress; Karl F. Ludwig, Jr.; Charles R. Eddy, Jr.
Adnan Mohammad; Deepa Shukla; Saidjafarzoda Ilhom; Brian Willis; Blaine Johs; Ali Kemal Okyay; Necmi Biyikli
Petro Deminskyi; Polla Rouf; Ivan G. Ivanov; Henrik Pedersen
Zhenzi Chen; Zhen Zhu; Kari Härkönen; Emma Salmi
Wan-Ho Choi; Jiazhen Sheng; Hyun-Jun Jeong; Jin-Seong Park; MinJung Kim; Woojin Jeon
Magi Mettry; Alexander E. Hess; Isabella Goetting; Noel Arellano; Alexander Friz; Andy Tek; Rudy J. Wojtecki
Kazuki Yoshida; Kentaro Saito; Masanori Miura; Kensaku Kanomata; Fumihiko Hirose
Miika Mattinen; Timo Hatanpää; Peter J. King; Kristoffer Meinander; Kenichiro Mizohata; Pasi Jalkanen; Jyrki Räisänen; Mikko Ritala; Markku Leskelä
Kosuke Yamamoto; Ayuta Suzuki; Munehito Kagaya; Masaaki Matsukuma; Tsuyoshi Moriya
David H. K. Jackson; Michael M. Schwartz; Chilan Ngo; Dustin Facteau; Svitlana Pylypenko; Christopher L. Marshall; Arrelaine A. Dameron
Rémi Vallat; Rémy Gassilloud; Olivier Salicio; Khalil El Hajjam; Gabriel Molas; Bernard Pelissier; Christophe Vallée
Nicholas A. Strnad; Daniel M. Potrepka; Jeffrey S. Pulskamp; Yang Liu; Jacob L. Jones; Raymond J. Phaneuf; Ronald G. Polcawich
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