Skip to Main Content
Skip Nav Destination

Computer Applications in Plasma Materials Processing: Complex and parameter-sensitive plasma processes may be better understood by a combination of simulation and experiment

Comput. Phys. 4, 584–590 (1990)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Luke Hanley
  • Hanjo Lim
  • David G. Schultz
  • Spiros Garbis
  • Chongwoo Yu
  • Earl T. Ada
  • Muthu B.J. Wijesundara
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 157, 174 (1999)
Close Modal

or Create an Account

Close Modal
Close Modal