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Book Chapter
Series: AIPP Books, Perspectives
Published: December 2021
10.1063/9780735423954_001
EISBN: 978-0-7354-2395-4
ISBN: 978-0-7354-2392-3
... Microfluidics Clinical Diagnostics Wearable sensors Biosensors Introduction Microelectromechanical systems, commonly abbreviated as MEMS, have introduced a class of miniaturized devices and systems with high sensitivity and rapid and accurate delivery of functions. In general, these devices are realized...