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Book Chapter

Recent Trends in CMOS-MEMS Sensors

Available to Purchase

Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_004
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Bhatt, M., “Recent trends in CMOS-MEMS sensors,” in MEMS Applications in Electronics and Engineering, edited by A. K. Basu, A. Basu, S. Ghosh, and S. Bhattacharya (AIP Publishing, Melville, New York, 2023), pp. 4-1–4-18. Introduction MEMS is currently one of the most explored areas due...
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Images
Block diagram of sensor system: sensor array, amplifiers, multiplexer, and filters integrated on a single chip.

Block diagram of sensor system: sensor array, amplifiers, multiplexer, and ...

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in Recent Trends in CMOS-MEMS Sensors > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 4.1 Block diagram of sensor system: sensor array, amplifiers, multiplexer, and filters integrated on a single chip. Reproduced with permission from Zimmermann et al., Sens. Actuators B 131 (1), 254–264 (2008). Copyright 2008 Elsevier. More about this image found in Block diagram of sensor system: sensor array, amplifiers, multiplexer, and ...
Images
Experimental uses of acceleration sensor.

Experimental uses of acceleration sensor.

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in Smartphones as an Educational Intervention for PER. Framing an Analysis for Determinants and Perspectives > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 3.1 Experimental uses of acceleration sensor. More about this image found in Experimental uses of acceleration sensor.
Images
Physics toolbox data display screen from the acceleration 3D sensor.

Physics toolbox data display screen from the acceleration 3D sensor.

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in Smartphones as an Educational Intervention for PER. Framing an Analysis for Determinants and Perspectives > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 3.2 Physics toolbox data display screen from the acceleration 3D sensor. More about this image found in Physics toolbox data display screen from the acceleration 3D sensor.
Images
Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/product/dual-range-force-sensor/) and Go Direct Force and Acceleration Sensor (right picture) [available at https://www.vernier.com/product/go-direct-force-and-acceleration-sensor/).

Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/produ...

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in Using Sensors and Digital Data Collection/Analysis Technologies in K–12 Physics Education Under the STEM Perspective > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 6.3 Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/product/dual-range-force-sensor/ ) and Go Direct Force and Acceleration Sensor (right picture) [available at https://www.vernier.com/product/go-direct-force-and-acceleration-sensor/ ). More about this image found in Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/produ...
Images
Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS49E-Linear-Hall-Sensor-p/ad316.htm) and QtiPlot. Data Analysis and scientific visualization (right picture) (see: https:// shorturl.at/lXYZ5).

Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS...

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in Using Sensors and Digital Data Collection/Analysis Technologies in K–12 Physics Education Under the STEM Perspective > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 6.8 Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS49E-Linear-Hall-Sensor-p/ad316.htm ) and QtiPlot. Data Analysis and scientific visualization (right picture) (see: https:// shorturl.at/lXYZ5 ). More about this image found in Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS...
Images
BME 280 pressure, humidity and temperature sensor (see: https://shorturl.at/dejkP).

BME 280 pressure, humidity and temperature sensor (see: https://shorturl.a...

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in Using Sensors and Digital Data Collection/Analysis Technologies in K–12 Physics Education Under the STEM Perspective > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 6.9 BME 280 pressure, humidity and temperature sensor (see: https://shorturl.at/dejkP ). More about this image found in BME 280 pressure, humidity and temperature sensor (see: https://shorturl.a...
Images
BMP180—Atmospheric Pressure Sensor (left picture) (see: https://components101.com/sensors/bmp180-atmospheric-pressure-sensor) and DS18B20 temperature sensor (right picture) (see: https:// shorturl.at/iqy02).

BMP180—Atmospheric Pressure Sensor (left picture) (see: https://component...

Available to Purchase
in Using Sensors and Digital Data Collection/Analysis Technologies in K–12 Physics Education Under the STEM Perspective > The International Handbook of Physics Education Research: Teaching Physics
Published: March 2023
FIG. 6.11 BMP180—Atmospheric Pressure Sensor (left picture) (see: https://components101.com/sensors/bmp180-atmospheric-pressure-sensor ) and DS18B20 temperature sensor (right picture) (see: https:// shorturl.at/iqy02 ). More about this image found in BMP180—Atmospheric Pressure Sensor (left picture) (see: https://component...
Book Chapter

Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques

Available to Purchase

Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_003
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Basu, A. K., “Recent progress in cantilever-based sensors: An overview of application and fabrication techniques,” in MEMS Applications in Electronics and Engineering, edited by A. K. Basu, A. Basu, S. Ghosh, and S. Bhattacharya (AIP Publishing, Melville, New York, 2023), pp. 3-1–3-16...
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Book Chapter

Using Sensors and Digital Data Collection/Analysis Technologies in K–12 Physics Education Under the STEM Perspective

Available to Purchase

Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_006
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
...Xenakis, A., Kalovrektis, K., Theodoropoulou, K., Karampelas, A., Giannakas, G., Sotiropoulos, D. J., and Vavougios, D., “Using sensors and digital data collection/analysis technologies in K-12 physics education under the STEM perspective,” in The International Handbook of Physics Education...
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Images
Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-based force sensor using a carbon resistor (shown in black) as the sensing component, contact pads shown in silver ink (shown in blue) with perforation of fold lines made by a laser cutter; (b) folded sensor; and (c) force–deflection curve of unfolded and folded cantilever.

Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-b...

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in Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 3.9 Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-based force sensor using a carbon resistor (shown in black) as the sensing component, contact pads shown in silver ink (shown in blue) with perforation of fold lines made by a laser cutter; (b) folded sensor More about this image found in Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-b...
Images
Process flowchart for integrating sensor using post-CMOS technology.

Process flowchart for integrating sensor using post-CMOS technology. Rep...

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in Recent Trends in CMOS-MEMS Sensors > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 4.7 Process flowchart for integrating sensor using post-CMOS technology. Reproduced with permission from Li et al., Procedia Eng. 47 , 1009–1012 (2012). Copyright 2012 Elsevier. More about this image found in Process flowchart for integrating sensor using post-CMOS technology. Rep...
Images
Schematic of a MEMS pressure sensor. On the left, we show the top view of the sensor, where we can see the configuration of the four piezoresistors in the Wheatstone bridge circuit. On the right, we show the cross-sectional view of the sensor and the deflection of the sensor diaphragm under an external pressure field (Sheela et al.).

Schematic of a MEMS pressure sensor. On the left, we show the top view of t...

Available to Purchase
in Mechanics of Materials Considerations in MEMS-Based Medical Devices > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 5.1 Schematic of a MEMS pressure sensor. On the left, we show the top view of the sensor, where we can see the configuration of the four piezoresistors in the Wheatstone bridge circuit. On the right, we show the cross-sectional view of the sensor and the deflection of the sensor diaphragm More about this image found in Schematic of a MEMS pressure sensor. On the left, we show the top view of t...
Images
(a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic of an out-of-plane actuated directional-coupler-based displacement sensor (Liu et al., 2020b). (c) A Fabry–Perot strain sensor (Niewczas et al., 2003) with arrayed waveguide grating to analyze the spectrum. (d) Microdisk as sensing element in a cantilever displacement sensor (Srinivasan et al., 2011).

(a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic ...

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in Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 7.17 (a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic of an out-of-plane actuated directional-coupler-based displacement sensor ( Liu et al., 2020b ). (c) A Fabry–Perot strain sensor ( Niewczas et al., 2003 ) with arrayed waveguide grating More about this image found in (a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic ...
Images
(a) Vertical pendulum tilt sensor (Dong et al., 2005) with three fiber Bragg gratings attached to three cantilevers. A tilt of the pendulum leads to bending of the cantilevers depending on the direction of the tilt. This leads the attached fiber Bragg grating to strain and change its reflection spectrum. (b) Schematic of a MEMS ring laser gyroscope with movable mirrors and lens. (Hashimoto et al., 2009). (c) Schematic of a passive resonant optical gyroscope using a fiber ring. The phase modulators are driven by antiphase triangular waves to reduce parasitic effects and allow the readout of Sagnac phase shift as amplitude at photodetector (Jin et al., 2007).

(a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) wi...

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in Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 7.19 (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) with three fiber Bragg gratings attached to three cantilevers. A tilt of the pendulum leads to bending of the cantilevers depending on the direction of the tilt. This leads the attached fiber Bragg grating to strain More about this image found in (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) wi...
Images
(a) SEM image of a typical microfabricated Si-based cantilever sensor array without any surface modification. Reprinted with permission from Baller et al., Ultramicroscopy 82(1–4), 1–9 (2000). Copyright 2000 Elsevier. (b) Schematic of H2 sensing MC with an integrated Si photonics-based interferometric optical readout. An underlying waveguide allowed portions of the light passing through it to diffract and reflect from the bottom side of the sensing MC back into the waveguide. This resulted in optical interference, which was dependent on the separation distance between the waveguide and the MC. (c) SEM image of the fabricated H2 sensing MC. The inset shows the A–A′ surface profile of the MC as measured by optical profilometry across the length. The location of the Si photonic waveguide is marked by dashed lines. It was hidden under a SiOx planarization layer. Reprinted with permission from Gurusamy et al., Sens. Actuators B Chem. 281, 335–342 (2019). Copyright 2019 Elsevier. (d) SEM image of the Ni-MOF-74 deposited resonant MC sensor used for CO detection where the material was coated onto the free-end of the MC. (e) Responses of the sensor to various concentrations of CO gas with a dynamic range from 10 ppb to 2.6 ppm. The inset depicts the magnified view of the sensor response to the lowest concentration of 10 ppb. Reprinted with permission from Lv et al., Sens. Actuators B Chem. 262, 562–569 (2018). Copyright 2018 Elsevier. (f) SEM image of the carboxyl group functionalized mesoporous silica nanoparticles (C-MSNs) loaded resonant MC sensor used for NH3 sensing. (g) Micro-gravimetric sensing curve of the C-MSNs decorated MC sensor to NH3 vapor at various concentrations in the range of 5–300 ppb. The inset shows the relationship between NH3 concentration and sensing response, which follows a Langmuir adsorption isotherm behavior; (h) repeatability test of the sensor to NH3 for three cycles at 120 ppb concentration; (i) selectivity test of the sensor to eight kinds of interfering gases. Reprinted with permission from Liu et al., Sens. Actuators B Chem. 257, 488–495 (2018b). Copyright 2018 Elsevier. (j) SEM image of the polymer nanocomposite MCs used for explosive vapor sensing. Reprinted with permission from Patil et al., Sens. Actuators B Chem. 192, 444–451 (2014).

(a) SEM image of a typical microfabricated Si-based cantilever sensor array...

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in Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 8.3 (a) SEM image of a typical microfabricated Si-based cantilever sensor array without any surface modification. Reprinted with permission from Baller et al., Ultramicroscopy 82 (1–4), 1–9 (2000). Copyright 2000 Elsevier. (b) Schematic of H2 sensing MC More about this image found in (a) SEM image of a typical microfabricated Si-based cantilever sensor array...
Images
(a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of the self-leveling sensor (i) 450 µm long device with PDMS polymer and (ii) magnified image of the suspended top electrode of the device with etch holes (i) Reproduced with permission from Likhite et al., Sens. Actuators B Chem. 311, 127817 (2020). Copyright 2020 Elsevier. (c) SEM images of AlGaN/GaN heterostructure based dual channel MC heater design [(i) and (ii)] SEM images of a monolithic tip dual channel MC heater. The sensor and heater channels are visible in (ii). (iii) and (iv) Split tip dual channel MC heater with sensor and heater channels marked in (iv). Reproduced with permission from Jahangir and Koley, Sci. Rep. 6, 28735 (2016). Copyright 2020 Author(s), licensed under a Creative Commons Attribution 3.0 Unported License. (d) Graphene membrane resonators (i) angled SEM image of suspended graphene membranes over fabricated trenches in SiO2. (ii) Angled SEM of an array of graphene membranes. (iii) Optical image of a large array of graphene membranes.

(a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of th...

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in Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 8.4 (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of the self-leveling sensor (i) 450 µm long device with PDMS polymer and (ii) magnified image of the suspended top electrode of the device with etch holes (i) Reproduced with permission from Likhite et al More about this image found in (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of th...
Images
(a) A closed membrane type MEMS-based gas sensor with Si3N4 as passivation layer and nanostructured SnO2 hollow sphere array. Reprinted with permission from Rao et al., ACS Appl. Mater. Interfaces 9(3), 2634–2641 (2017). Copyright 2017 American Chemical Society. (b) Another closed membrane type microheater design with SiO2 passivation layer and transparent ITO electrodes with ZnO nanowires as sensing element. Reprinted with permission from Hsueh et al., Sens. Actuators B Chem. 304, 127319 (2020). Copyright 2020 Elsevier. (c) Top view and section view of a suspended membrane type structure of microheater design. Reprinted with permission from Zhou et al., Sens. Actuators A 223, 67–75 (2015).

(a) A closed membrane type MEMS-based gas sensor with Si3N4...

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in Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 8.6 (a) A closed membrane type MEMS-based gas sensor with Si3N4 as passivation layer and nanostructured SnO2 hollow sphere array. Reprinted with permission from Rao et al., ACS Appl. Mater. Interfaces 9 (3), 2634–2641 (2017). Copyright 2017 American More about this image found in (a) A closed membrane type MEMS-based gas sensor with Si3N4...
Book Chapter

β-Ga2O3 Bulk Growth Techniques

Available to Purchase

Series: AIPP Books, Principles
Published: February 2023
10.1063/9780735425033_002
EISBN: 978-0-7354-2503-3
ISBN: 978-0-7354-2500-2
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Images
A schematic of a full Wheatstone bridge circuit with four variable resistors. These resistors represent the piezoresistors mounted on the diaphragm of a MEMS pressure sensor. When the sensor diaphragm remains undeformed, the bridge is balanced, and no signal is detected between points 1 and 3. However, in the presence of an external pressure field, the diaphragm of the sensor deforms, and the resistances of the piezoresistors change. This creates an imbalance in the circuit resulting in a proportional voltage change across the bridge (between points 1 and 3), which is then measured to calculate the pressure changes (Sheela et al.).

A schematic of a full Wheatstone bridge circuit with four variable resistor...

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in Mechanics of Materials Considerations in MEMS-Based Medical Devices > MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 5.2 A schematic of a full Wheatstone bridge circuit with four variable resistors. These resistors represent the piezoresistors mounted on the diaphragm of a MEMS pressure sensor. When the sensor diaphragm remains undeformed, the bridge is balanced, and no signal is detected between points 1 More about this image found in A schematic of a full Wheatstone bridge circuit with four variable resistor...