FIG. 7.15 Rotating mirror with (a) single degree of freedom ( Lin et al., 2000 ) and (b) two degrees of freedom ( Kudrle et al., 2005 ). More about this image found in Rotating mirror with (a) single degree of freedom ( Lin et al.,...

FIG. 7.24 (a) Two-axis MEMS mirror and grating based 1 × N wavelength router ( Stepanovsky, 2019 ). (b) A switchable wavelength add-drop filter array implemented using coupling-gap tuning of ring resonators ( Takahashi et al., 2008 ). (c) Frequency tuning of ring resonator by changing the perimeter of the ring ( Chu and Hane, 2014 ). (d) A ring resonator tuned by the proximity of a beam near the ring ( Yao et al., 2007 ). (e) Tuning of a ring resonator by bending the ring to the proximity of a high refractive index rim ( Errando-Herranz et al., 2015 ). (f) MEMS tuned microsphere switch ( Blue et al., 2011 ). More about this image found in (a) Two-axis MEMS mirror and grating based 1 × N wavelength router ( Stepan...

FIG. 7.23 (a) Strictly non-blocking 2D N × N switch requiring N² single axis mirrors ( Stepanovsky, 2019 ; and Horsley et al., 2005 ). (b) A 3-axis micromirror array capable of N × N routing using 2 N mirrors ( Stepanovsky, 2019 ). (c) An N × N planar switch implemented using tunable directional couplers ( Han et al., 2015 ; and Stepanovsky, 2019 ). More about this image found in (a) Strictly non-blocking 2D N × N switch requiring N² single ax...

FIG. 7.18 (a) Micromachined interferometric accelerometer showing the two optical beams, one from the diffraction grating and second from the mirror, which will interfere at the photodetector. (b) SiN nanobeam pair acting as “zipper” photonic crystal optomechanical cavity for accelerometry ( Krause et al., 2012 ). (c) Microdisk coupled to cantilever acting as a force sensor ( Doolin et al., 2014 ). The cantilever can deflect in both out-of-plane and in-plane mechanical modes. This results in the modulation of the disk's optical resonance frequency and is read out optically using a coupled fiber. (d) Split beam nano-cavity torque sensor ( Wu et al., 2014 ) showing the three degrees of freedom. One is out-of-plane rotation of the suspended mirror about the torsion beam, the second is in-plane bending about the torsion beam, and the third is out-of-plane bending of the cantilever mirror. More about this image found in (a) Micromachined interferometric accelerometer showing the two optical bea...

FIG. 7.19 (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) with three fiber Bragg gratings attached to three cantilevers. A tilt of the pendulum leads to bending of the cantilevers depending on the direction of the tilt. This leads the attached fiber Bragg grating to strain and change its reflection spectrum. (b) Schematic of a MEMS ring laser gyroscope with movable mirrors and lens. ( Hashimoto et al., 2009 ). (c) Schematic of a passive resonant optical gyroscope using a fiber ring. The phase modulators are driven by antiphase triangular waves to reduce parasitic effects and allow the readout of Sagnac phase shift as amplitude at photodetector ( Jin et al., 2007 ). More about this image found in (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) wi...