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in Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications
> MEMS Applications in Electronics and Engineering
Published: March 2023
FIG. 8.6 (a) A closed membrane type MEMS-based gas sensor with Si3N4 as passivation layer and nanostructured SnO2 hollow sphere array. Reprinted with permission from Rao et al., ACS Appl. Mater. Interfaces 9 (3), 2634–2641 (2017). Copyright 2017 American Chemical Society. (b) Another closed membrane type microheater design with SiO2 passivation layer and transparent ITO electrodes with ZnO nanowires as sensing element. Reprinted with permission from Hsueh et al., Sens. Actuators B Chem. 304 , 127319 (2020). Copyright 2020 Elsevier. (c) Top view and section view of a suspended membrane type structure of microheater design. Reprinted with permission from Zhou et al., Sens. Actuators A 223 , 67–75 (2015). Copyright 2015 Elsevier. More about this image found in (a) A closed membrane type MEMS-based gas sensor with Si3N4...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2559-0
ISBN: 978-0-7354-2556-9
... bars ,” Philos. Mag 30 , 225 ( 1847 ). 10.1080/14786444708645656 Kainuma , R. , Imano , Y. , Ito , W. , Sutou , Y. , Morito , H. , Okamoto , S. , Kitakami , O. , Oikawa , K. , Fujita , A. , Kanomata , T. , and Ishida , K. , “ Magnetic-field...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_008
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... hollow sphere array. Reprinted with permission from Rao et al., ACS Appl. Mater. Interfaces 9 (3), 2634–2641 (2017). Copyright 2017 American Chemical Society. (b) Another closed membrane type microheater design with SiO2 passivation layer and transparent ITO electrodes with ZnO...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... ZnO nanowire MEMS gas sensor prepared by an ITO micro-heater ,” Sens. Actuators B Chem. 304 , 127319 ( 2020 ). 10.1016/j.snb.2019.127319 Iwata , T. , Soo , W. P. C. , Matsuda , K. , Takahashi , K. , Ishida , M. , and Sawada , K. , “ Design, fabrication...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735425590_009
EISBN: 978-0-7354-2559-0
ISBN: 978-0-7354-2556-9
... solidification ,” Mat. Sci. Engg. B 122 , 174 – 178 ( 2005 ). 10.1016/j.mseb.2005.02.068 Joule , J. P. , “ On the effects of magnetism upon the dimensions of iron and steel bars ,” Philos. Mag 30 , 225 ( 1847 ). 10.1080/14786444708645656 Kainuma , R. , Imano , Y. , Ito , W...
Book
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735425590
EISBN: 978-0-7354-2559-0
ISBN: 978-0-7354-2556-9
Book Chapter
Series: AIPP Books, Principles
Published: November 2022
10.1063/9780735425194_003
EISBN: 978-0-7354-2519-4
ISBN: 978-0-7354-2508-8
Book
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
Book Chapter
Series: AIPP Books, Principles
Published: February 2023
10.1063/9780735425033_001
EISBN: 978-0-7354-2503-3
ISBN: 978-0-7354-2500-2
... ultraviolet solar-blind detectors due to its transparency out to ∼260-nm wavelength. The doped β-Ga2O3 is of further interest to develop highly transparent electrodes as an alternative to indium tin oxide (ITO) for application in power-tolerant and visible region optoelectronic devices...
Book Chapter
Series: AIPP Books, Methods
Published: November 2022
0
EISBN: 978-0-7354-2419-7
ISBN: 978-0-7354-2416-6
....2020.11.002 Shen , X. , Zhang , X.-Q. , Ding , F. , Huang , J.-Q. , Xu , R. , Chen , X. , “ Advanced electrode materials in lithium batteries: Retrospect and prospect ,” Energy Mater. Adv. 2021 , 1205324 ( 2021b ). 10.34133/2021/1205324 Song , C. , Ito , K...
Book Chapter
Series: AIPP Books, Principles
Published: November 2022
0
EISBN: 978-0-7354-2447-0
ISBN: 978-0-7354-2444-9
.... , “ 3D conducting polymer platforms for electrical control of protein conformation and cellular functions ,” J. Mater. Chem. B Mater. Biol. Med. 3 ( 25 ), 5040 – 5048 ( 2015 ). 10.1038/nbt.3121.ChIP-nexus Wang , X. , “ Supported lipid bilayer membrane arrays on micro-patterned ITO...
Book Chapter
Series: AIPP Books, Principles
Published: November 2022
10.1063/9780735424470_009
EISBN: 978-0-7354-2447-0
ISBN: 978-0-7354-2444-9
... is highly desirable in biology, as it provides a more holistic characterization of the system under investigation and allows us to cross correlate electrical data with well-established methods. Suitable conductive substrates for this purpose include indium tin oxide (ITO) and graphene, which owing...
Book Chapter
Series: AIPP Books, Methods
Published: November 2022
10.1063/9780735424197_002
EISBN: 978-0-7354-2419-7
ISBN: 978-0-7354-2416-6
..., the 640 series of line position standards using silicon metal powder can be procured from NIST for this purpose. Corrected data can then be indexed automatically using classic indexing algorithms, such as DICVOL, ITO, and TREOR, and modern implementations of these are widely available ( Visser, 1969...
Book Chapter
Series: AIPP Books, Methods
Published: November 2022
10.1063/9780735424197_006
EISBN: 978-0-7354-2419-7
ISBN: 978-0-7354-2416-6
... , R. , Chen , X. , “ Advanced electrode materials in lithium batteries: Retrospect and prospect ,” Energy Mater. Adv. 2021 , 1205324 ( 2021b ). 10.34133/2021/1205324 Song , C. , Ito , K. , Sakata , O. , and Kubo , Y. , “ Operando structural study of non-aqueous Li...
Book
Series: AIPP Books, Methods
Published: November 2022
10.1063/9780735424197
EISBN: 978-0-7354-2419-7
ISBN: 978-0-7354-2416-6
Book
Series: AIPP Books, Principles
Published: November 2022
10.1063/9780735424470
EISBN: 978-0-7354-2447-0
ISBN: 978-0-7354-2444-9
Book Chapter
Series: AIPP Books, Principles
Published: July 2022
10.1063/9780735424272_005
EISBN: 978-0-7354-2427-2
ISBN: 978-0-7354-2424-1
..., or indium-doped tin oxide, ITO), which is called a photoanode or working electrode (WE). For flexible solar cells configuration, the dye-anchored MOS can be developed on ITO-coated polyethylene terephthalate (ITO/PET) polymeric films. FIG. 5.9 The fabrication process and simplified device architecture...
Book
Series: AIPP Books, Principles
Published: July 2022
10.1063/9780735424272
EISBN: 978-0-7354-2427-2
ISBN: 978-0-7354-2424-1
Book Chapter
Series: AIPP Books, Principles
Published: May 2022
0
EISBN: 978-0-7354-2467-8
ISBN: 978-0-7354-2464-7
... engineering ,” Arthritis Res. Ther. 5 ( 1 ), 32 – 45 ( 2003 ). 10.1186/ar614 Turcotte , R. , Alt , C. , Runnels , J. , Ito , K. , Wu , J. , Zaher , W. , Mortensen , L. , Silberstein , L. , Côté , D. , Kung , A. , Ito , K. , and Lin , C. , “ Image...
Book Chapter
Series: AIPP Books, Principles
Published: May 2022
0
EISBN: 978-0-7354-2479-1
ISBN: 978-0-7354-2476-0
... , A. , Kondo , T. , Nakamura , J. , Ito , S.-I. , “ Near room temperature chemical vapor deposition of graphene with diluted methane and molten gallium catalyst ,” Sci. Rep. 7 , 12371 ( 2017 ). 10.1038/s41598-017-12380-w Gan , L. and Luo , Z. , “ Turning off hydrogen to realize...
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