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Book Chapter
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_006
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
... Learning outcome Related variables Hardware used Software acquisition and analysis Reference Kinematics Calculation of free fall's time h, t LCD, laser sensor, electromagnet module, Arduino UNO ( Arduino UNO ) … Süzen and Kayaalp, 2019 Understanding of the conservation...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_003
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Basu, A. K., “Recent progress in cantilever-based sensors: An overview of application and fabrication techniques,” in MEMS Applications in Electronics and Engineering, edited by A. K. Basu, A. Basu, S. Ghosh, and S. Bhattacharya (AIP Publishing, Melville, New York, 2023), pp. 3-1–3-16...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_004
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Bhatt, M., “Recent trends in CMOS-MEMS sensors,” in MEMS Applications in Electronics and Engineering, edited by A. K. Basu, A. Basu, S. Ghosh, and S. Bhattacharya (AIP Publishing, Melville, New York, 2023), pp. 4-1–4-18. Introduction MEMS is currently one of the most explored areas due...
Book Chapter
Series: AIPP Books, Principles
Published: November 2022
10.1063/9780735425194_003
EISBN: 978-0-7354-2519-4
ISBN: 978-0-7354-2508-8
...Wang, D. F., Han, H., Zhao, Z., Liu, S., Chen, B., Wang, X., Fang, Y., Lv, M., Fan, L., Zhu, X., Itoh, T., and Maeda, R., “Non-invasive passive resonant electric current sensors for EVs,” in Advanced Sensors and Sensing Technologies for Electric Vehicles, edited by W. Cao and S. Lu (AIP...
Book
Book Cover Image
Series: AIPP Books, Principles
Published: November 2022
10.1063/9780735425194
EISBN: 978-0-7354-2519-4
ISBN: 978-0-7354-2508-8
Images
Block diagram of <span class="search-highlight">sensor</span> system: <span class="search-highlight">sensor</span> array, amplifiers, multiplexer, and ...
Published: March 2023
FIG. 4.1 Block diagram of sensor system: sensor array, amplifiers, multiplexer, and filters integrated on a single chip. Reproduced with permission from Zimmermann et al., Sens. Actuators B 131 (1), 254–264 (2008). Copyright 2008 Elsevier. More about this image found in Block diagram of sensor system: sensor array, amplifiers, multiplexer, and ...
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Dual-Range Force <span class="search-highlight">Sensor</span> (left picture) (see:  https://www.vernier.com/produ...
Published: March 2023
FIG. 6.3 Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/product/dual-range-force-sensor/ ) and Go Direct Force and Acceleration Sensor (right picture) [available at https://www.vernier.com/product/go-direct-force-and-acceleration-sensor/ ). More about this image found in Dual-Range Force Sensor (left picture) (see: https://www.vernier.com/produ...
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Linear Hall effect <span class="search-highlight">sensor</span> (left picture) (see:  https://www.addicore.com/SS...
Published: March 2023
FIG. 6.8 Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS49E-Linear-Hall-Sensor-p/ad316.htm ) and QtiPlot. Data Analysis and scientific visualization (right picture) (see: https:// shorturl.at/lXYZ5 ). More about this image found in Linear Hall effect sensor (left picture) (see: https://www.addicore.com/SS...
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Paper-based piezoresistive force <span class="search-highlight">sensor</span>. (a) Schematic diagram of a paper-b...
Published: March 2023
FIG. 3.9 Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-based force sensor using a carbon resistor (shown in black) as the sensing component, contact pads shown in silver ink (shown in blue) with perforation of fold lines made by a laser cutter; (b) folded sensor; and (c) force–deflection curve of unfolded and folded cantilever. Reprinted with permission from Liu et al., Lab Chip 11 (13), 2189 (2011). Copyright 2011 Royal Society of Chemistry. More about this image found in Paper-based piezoresistive force sensor. (a) Schematic diagram of a paper-b...
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Process flowchart for integrating <span class="search-highlight">sensor</span> using post-CMOS technology.    Rep...
Published: March 2023
FIG. 4.7 Process flowchart for integrating sensor using post-CMOS technology. Reproduced with permission from Li et al., Procedia Eng. 47 , 1009–1012 (2012). Copyright 2012 Elsevier. More about this image found in Process flowchart for integrating sensor using post-CMOS technology. Rep...
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Schematic of a MEMS pressure <span class="search-highlight">sensor</span>. On the left, we show the top view of t...
Published: March 2023
FIG. 5.1 Schematic of a MEMS pressure sensor. On the left, we show the top view of the sensor, where we can see the configuration of the four piezoresistors in the Wheatstone bridge circuit. On the right, we show the cross-sectional view of the sensor and the deflection of the sensor diaphragm under an external pressure field ( Sheela et al.) . More about this image found in Schematic of a MEMS pressure sensor. On the left, we show the top view of t...
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(a) Homodyne-Michelson-interferometer-based position <span class="search-highlight">sensor</span>. (b) Schematic ...
Published: March 2023
FIG. 7.17 (a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic of an out-of-plane actuated directional-coupler-based displacement sensor ( Liu et al., 2020b ). (c) A Fabry–Perot strain sensor ( Niewczas et al., 2003 ) with arrayed waveguide grating to analyze the spectrum. (d) Microdisk as sensing element in a cantilever displacement sensor ( Srinivasan et al., 2011 ). More about this image found in (a) Homodyne-Michelson-interferometer-based position sensor. (b) Schematic ...
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(a) Vertical pendulum tilt <span class="search-highlight">sensor</span> ( Dong <em>et al.,</em> 2005 ) wi...
Published: March 2023
FIG. 7.19 (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) with three fiber Bragg gratings attached to three cantilevers. A tilt of the pendulum leads to bending of the cantilevers depending on the direction of the tilt. This leads the attached fiber Bragg grating to strain and change its reflection spectrum. (b) Schematic of a MEMS ring laser gyroscope with movable mirrors and lens. ( Hashimoto et al., 2009 ). (c) Schematic of a passive resonant optical gyroscope using a fiber ring. The phase modulators are driven by antiphase triangular waves to reduce parasitic effects and allow the readout of Sagnac phase shift as amplitude at photodetector ( Jin et al., 2007 ). More about this image found in (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) wi...
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(a) SEM image of a typical microfabricated Si-based cantilever <span class="search-highlight">sensor</span> array...
Published: March 2023
FIG. 8.3 (a) SEM image of a typical microfabricated Si-based cantilever sensor array without any surface modification. Reprinted with permission from Baller et al., Ultramicroscopy 82 (1–4), 1–9 (2000). Copyright 2000 Elsevier. (b) Schematic of H2 sensing MC with an integrated Si photonics-based interferometric optical readout. An underlying waveguide allowed portions of the light passing through it to diffract and reflect from the bottom side of the sensing MC back into the waveguide. This resulted in optical interference, which was dependent on the separation distance between the waveguide and the MC. (c) SEM image of the fabricated H2 sensing MC. The inset shows the A–A′ surface profile of the MC as measured by optical profilometry across the length. The location of the Si photonic waveguide is marked by dashed lines. It was hidden under a SiOx planarization layer. Reprinted with permission from Gurusamy et al., Sens. Actuators B Chem. 281 , 335–342 (2019). Copyright 2019 Elsevier. (d) SEM image of the Ni-MOF-74 deposited resonant MC sensor used for CO detection where the material was coated onto the free-end of the MC. (e) Responses of the sensor to various concentrations of CO gas with a dynamic range from 10 ppb to 2.6 ppm. The inset depicts the magnified view of the sensor response to the lowest concentration of 10 ppb. Reprinted with permission from Lv et al., Sens. Actuators B Chem. 262 , 562–569 (2018). Copyright 2018 Elsevier. (f) SEM image of the carboxyl group functionalized mesoporous silica nanoparticles (C-MSNs) loaded resonant MC sensor used for NH3 sensing. (g) Micro-gravimetric sensing curve of the C-MSNs decorated MC sensor to NH3 vapor at various concentrations in the range of 5–300 ppb. The inset shows the relationship between NH3 concentration and sensing response, which follows a Langmuir adsorption isotherm behavior; (h) repeatability test of the sensor to NH3 for three cycles at 120 ppb concentration; (i) selectivity test of the sensor to eight kinds of interfering gases. Reprinted with permission from Liu et al., Sens. Actuators B Chem. 257 , 488–495 (2018b). Copyright 2018 Elsevier. (j) SEM image of the polymer nanocomposite MCs used for explosive vapor sensing. Reprinted with permission from Patil et al., Sens. Actuators B Chem. 192 , 444–451 (2014). Copyright 2014 Elsevier. More about this image found in (a) SEM image of a typical microfabricated Si-based cantilever sensor array...
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(a) Schematic of a self-leveling capacitive VOC <span class="search-highlight">sensor</span>. (b) SEM image of th...
Published: March 2023
FIG. 8.4 (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of the self-leveling sensor (i) 450 µm long device with PDMS polymer and (ii) magnified image of the suspended top electrode of the device with etch holes (i) Reproduced with permission from Likhite et al., Sens. Actuators B Chem. 311 , 127817 (2020). Copyright 2020 Elsevier. (c) SEM images of AlGaN/GaN heterostructure based dual channel MC heater design [(i) and (ii)] SEM images of a monolithic tip dual channel MC heater. The sensor and heater channels are visible in (ii). (iii) and (iv) Split tip dual channel MC heater with sensor and heater channels marked in (iv). Reproduced with permission from Jahangir and Koley, Sci. Rep. 6 , 28735 (2016). Copyright 2020 Author(s), licensed under a Creative Commons Attribution 3.0 Unported License. (d) Graphene membrane resonators (i) angled SEM image of suspended graphene membranes over fabricated trenches in SiO2. (ii) Angled SEM of an array of graphene membranes. (iii) Optical image of a large array of graphene membranes. Reprinted with permission from van der Zande et al., Nano Lett. 10 (12), 4869–4873 ( 2010 ). Copyright 2010 American Chemical Society. More about this image found in (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of th...
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(a) A closed membrane type MEMS-based gas <span class="search-highlight">sensor</span> with Si<sub>3</sub>N<sub>4</sub>...
Published: March 2023
FIG. 8.6 (a) A closed membrane type MEMS-based gas sensor with Si3N4 as passivation layer and nanostructured SnO2 hollow sphere array. Reprinted with permission from Rao et al., ACS Appl. Mater. Interfaces 9 (3), 2634–2641 (2017). Copyright 2017 American Chemical Society. (b) Another closed membrane type microheater design with SiO2 passivation layer and transparent ITO electrodes with ZnO nanowires as sensing element. Reprinted with permission from Hsueh et al., Sens. Actuators B Chem. 304 , 127319 (2020). Copyright 2020 Elsevier. (c) Top view and section view of a suspended membrane type structure of microheater design. Reprinted with permission from Zhou et al., Sens. Actuators A 223 , 67–75 (2015). Copyright 2015 Elsevier. More about this image found in (a) A closed membrane type MEMS-based gas sensor with Si3N4...