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Optical Sensors

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(a) Micromachined interferometric accelerometer showing the two <span class="search-highlight">optical</span> bea...
Published: March 2023
FIG. 7.18 (a) Micromachined interferometric accelerometer showing the two optical beams, one from the diffraction grating and second from the mirror, which will interfere at the photodetector. (b) SiN nanobeam pair acting as “zipper” photonic crystal optomechanical cavity for accelerometry ( Krause et al., 2012 ). (c) Microdisk coupled to cantilever acting as a force sensor ( Doolin et al., 2014 ). The cantilever can deflect in both out-of-plane and in-plane mechanical modes. This results in the modulation of the disk's optical resonance frequency and is read out optically using a coupled fiber. (d) Split beam nano-cavity torque sensor ( Wu et al., 2014 ) showing the three degrees of freedom. One is out-of-plane rotation of the suspended mirror about the torsion beam, the second is in-plane bending about the torsion beam, and the third is out-of-plane bending of the cantilever mirror. More about this image found in (a) Micromachined interferometric accelerometer showing the two optical bea...
Book Chapter
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_006
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
... Estimation of atmospheric pressure h, A BME 280 sensor ( Datasheet BME280 ) Arduino IDE ( Arduino IDE version 1.8.9 ) Farcas and Caltun, 2021 Table 6.8 Learning outcomes and equipment in geometric optics. Topic area Learning outcome Related variables Hardware used Software...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... , A. , Lawall , J. R. , Taylor , J. M. , LeBrun , T. W.   et al. , “ An optomechanical accelerometer with a high-finesse hemispherical optical cavity ,” in 2016 IEEE International Symposium on Inertial Sensors and Systems ( IEEE , 2016 ), pp. 105 – 108 . Bao , Y. , Zhou , F...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_index
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics...
Images
(a) SEM image of a typical microfabricated Si-based cantilever <span class="search-highlight">sensor</span> array...
Published: March 2023
FIG. 8.3 (a) SEM image of a typical microfabricated Si-based cantilever sensor array without any surface modification. Reprinted with permission from Baller et al., Ultramicroscopy 82 (1–4), 1–9 (2000). Copyright 2000 Elsevier. (b) Schematic of H2 sensing MC with an integrated Si photonics-based interferometric optical readout. An underlying waveguide allowed portions of the light passing through it to diffract and reflect from the bottom side of the sensing MC back into the waveguide. This resulted in optical interference, which was dependent on the separation distance between the waveguide and the MC. (c) SEM image of the fabricated H2 sensing MC. The inset shows the A–A′ surface profile of the MC as measured by optical profilometry across the length. The location of the Si photonic waveguide is marked by dashed lines. It was hidden under a SiOx planarization layer. Reprinted with permission from Gurusamy et al., Sens. Actuators B Chem. 281 , 335–342 (2019). Copyright 2019 Elsevier. (d) SEM image of the Ni-MOF-74 deposited resonant MC sensor used for CO detection where the material was coated onto the free-end of the MC. (e) Responses of the sensor to various concentrations of CO gas with a dynamic range from 10 ppb to 2.6 ppm. The inset depicts the magnified view of the sensor response to the lowest concentration of 10 ppb. Reprinted with permission from Lv et al., Sens. Actuators B Chem. 262 , 562–569 (2018). Copyright 2018 Elsevier. (f) SEM image of the carboxyl group functionalized mesoporous silica nanoparticles (C-MSNs) loaded resonant MC sensor used for NH3 sensing. (g) Micro-gravimetric sensing curve of the C-MSNs decorated MC sensor to NH3 vapor at various concentrations in the range of 5–300 ppb. The inset shows the relationship between NH3 concentration and sensing response, which follows a Langmuir adsorption isotherm behavior; (h) repeatability test of the sensor to NH3 for three cycles at 120 ppb concentration; (i) selectivity test of the sensor to eight kinds of interfering gases. Reprinted with permission from Liu et al., Sens. Actuators B Chem. 257 , 488–495 (2018b). Copyright 2018 Elsevier. (j) SEM image of the polymer nanocomposite MCs used for explosive vapor sensing. Reprinted with permission from Patil et al., Sens. Actuators B Chem. 192 , 444–451 (2014). Copyright 2014 Elsevier. More about this image found in (a) SEM image of a typical microfabricated Si-based cantilever sensor array...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_007
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... bandwidth filters. High Q resonators made using rings/disks/spheres can have high sensitivity to optical parameter changes, which are brought about by mechanical means in MOEMS, thereby enhancing the sensitivity of sensors, power consumption of switches, and special functionality in actuators. Present-day...
Book
Book Cover Image
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_004
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... be varied in accordance with devise many MEMS devices to be integrated with CMOS circuits. CMOS circuitry can be co-fabricated among actuators and sensors towards bioMEMS applications, optical, magnetic, tactile, infrared, temperature, proximity sensors and some mixed applications such as thermoelectric...
Book Chapter
Series: AIPP Books, Professional
Published: March 2023
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
... ( 2019 ). 10.1088/1361-6552/ab1ce1 BMP180—Atmospheric Pressure Sensor , see https://components101.com/sensors/bmp180-atmospheric-pressure-sensor Briggle , J. , Physics Education   48 , 285 – 288 ( 2013 ). 10.1088/0031-9120/48/3/285 Bryan , J. A. , “ Physics instruction...
Images
(a) Schematic of a self-leveling capacitive VOC <span class="search-highlight">sensor</span>. (b) SEM image of th...
Published: March 2023
FIG. 8.4 (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of the self-leveling sensor (i) 450 µm long device with PDMS polymer and (ii) magnified image of the suspended top electrode of the device with etch holes (i) Reproduced with permission from Likhite et al., Sens. Actuators B Chem. 311 , 127817 (2020). Copyright 2020 Elsevier. (c) SEM images of AlGaN/GaN heterostructure based dual channel MC heater design [(i) and (ii)] SEM images of a monolithic tip dual channel MC heater. The sensor and heater channels are visible in (ii). (iii) and (iv) Split tip dual channel MC heater with sensor and heater channels marked in (iv). Reproduced with permission from Jahangir and Koley, Sci. Rep. 6 , 28735 (2016). Copyright 2020 Author(s), licensed under a Creative Commons Attribution 3.0 Unported License. (d) Graphene membrane resonators (i) angled SEM image of suspended graphene membranes over fabricated trenches in SiO2. (ii) Angled SEM of an array of graphene membranes. (iii) Optical image of a large array of graphene membranes. Reprinted with permission from van der Zande et al., Nano Lett. 10 (12), 4869–4873 ( 2010 ). Copyright 2010 American Chemical Society. More about this image found in (a) Schematic of a self-leveling capacitive VOC sensor. (b) SEM image of th...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_001
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... by enhancing the absorption or adhesion of a certain analyte or stimulus to the surface of the cantilever. As such, the specificity of the sensor to a certain analyte or stimulus can also be enhanced. Despite the feasibility of optical methods, electrical methods are preferred to obtain the output from...
Book Chapter
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_003
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
... and perspectives,” in The International Handbook of Physics Education Research: Teaching Physics, edited by M. F. Taşar and P. R. L. Heron (AIP Publishing, Melville, New York, 2023), pp. 3-1–3-24. An optical fingerprint scanner (usually an image sensor or a light-sensitive microchip) illuminates...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_003
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
.... , “ A paper-based cantilever array sensor: Monitoring volatile organic compounds with naked eye ,” Talanta   158 , 57 ( 2016 ). 10.1016/j.talanta.2016.05.048 Hermans , R. I. , Dueck , B. , Ndieyira , J. W. , McKendry , R. A. , and Aeppli , G. , “ Optical diffraction...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_008
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... a robust miniaturized H2 sensor based on Pd functionalized MC with integrated Si photonics-based interferometric optical readout [schematic of the sensor structure and SEM image of the MC depicted in Figs. 8.3(b) and 8.3(c) , respectively] with the resolving capability of the sensor...
Images
(a) Vertical pendulum tilt <span class="search-highlight">sensor</span> ( Dong <em>et al.,</em> 2005 ) wi...
Published: March 2023
FIG. 7.19 (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) with three fiber Bragg gratings attached to three cantilevers. A tilt of the pendulum leads to bending of the cantilevers depending on the direction of the tilt. This leads the attached fiber Bragg grating to strain and change its reflection spectrum. (b) Schematic of a MEMS ring laser gyroscope with movable mirrors and lens. ( Hashimoto et al., 2009 ). (c) Schematic of a passive resonant optical gyroscope using a fiber ring. The phase modulators are driven by antiphase triangular waves to reduce parasitic effects and allow the readout of Sagnac phase shift as amplitude at photodetector ( Jin et al., 2007 ). More about this image found in (a) Vertical pendulum tilt sensor ( Dong et al., 2005 ) wi...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735425590_004
EISBN: 978-0-7354-2559-0
ISBN: 978-0-7354-2556-9
... lattice strain and electronic structure changes leading to the conductance modulation in semiconductors is of long-standing interest in materials science and has potential applications in piezoresistive strain gauges, pressure sensors, and cantilever force sensors. Studies have shown that the electronic...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_frontmatter
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Front Matter MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... , A. , and Bhattacharya , S. , “ Recent trends and progress in MEMS-based bioinspired/biomimetic sensors ,” in MEMS Applications in Biology and Healthcare , edited by A. K.   Basu , A.   Basu , S.   Ghosh , and S.   Bhattacharya ( AIP Publishing LLC , New York , 2021a ). 10.1063...
Book
Book Cover Image
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... , S. , and Bhattacharya , S. , “ Recent trends and progress in MEMS-based bioinspired/biomimetic sensors ,” in MEMS Applications in Biology and Healthcare , edited by A. K.   Basu , A.   Basu , S.   Ghosh , and S.   Bhattacharya ( AIP Publishing LLC , New York , 2021a...