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(a) Micromachined interferometric accelerometer showing the two optical bea...
Published: March 2023
FIG. 7.18 (a) Micromachined interferometric accelerometer showing the two optical beams, one from the diffraction grating and second from the mirror, which will interfere at the photodetector. (b) SiN nanobeam pair acting as “zipper” photonic crystal optomechanical cavity for accelerometry ( Krause et al., 2012 ). (c) Microdisk coupled to cantilever acting as a force sensor ( Doolin et al., 2014 ). The cantilever can deflect in both out-of-plane and in-plane mechanical modes. This results in the modulation of the disk's optical resonance frequency and is read out optically using a coupled fiber. (d) Split beam nano-cavity torque sensor ( Wu et al., 2014 ) showing the three degrees of freedom. One is out-of-plane rotation of the suspended mirror about the torsion beam, the second is in-plane bending about the torsion beam, and the third is out-of-plane bending of the cantilever mirror. More about this image found in (a) Micromachined interferometric accelerometer showing the two optical bea...
Book Chapter
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_006
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
... of mechanical energy x, v Camera Vernier Logger Pro ( Vermier Logger Pro ) Bryan, 2010 Ultrasonic sensor Vernier Logger Pro ( Vermier Logger Pro ) Yakubov et al., 2005 Camera Video Tracker ( Tracker Video Analysis and Modelling Tool ) Fahrunnisa et al., 2021...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... ( 1998 ). 10.1038/28566 Gabrielson , T. B. , “ Mechanical-thermal noise in micromachined acoustic and vibration sensors ,” IEEE Trans. Electron Devices   40 ( 5 ), 903 – 909 ( 1993 ). 10.1109/16.210197 Gao , C. , Qi , B. , Gao , Y. , Zhu , Z. , and Li , C...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_005
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... ), material selection of MEMS pressure sensors ( Mehmood et al., 2019 ). However, with more complex MEMS device architectures and a greater number of materials with different properties (such as coefficient of thermal expansion), there is a need for focused research on mechanics perspectives for MEMS...
Book
Book Cover Image
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_001
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... system demands a long-lasting battery life, there is an urge to develop sensors and integrated circuits with ultra-low power consumption. As such, a potential solution is to harvest energy from mechanical vibrations and motions for MEMS devices under environmental stimuli. Although high performance...
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Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... populations: Validity and reliability issues ,” Phys. Ther. Rev.   15 ( 3 ), 135 – 142 ( 2010 ). 10.1179/1743288X10Y.0000000004 Basu , A. K. , Basak , A. , and Bhattacharya , S. , “ Geometry and thickness dependant anomalous mechanical behavior of fabricated Su-8 thin film micro...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... ). 10.1016/S0925-4005(00)00546-3 Hierold , C. , “ Intelligent CMOS sensors ,” in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) ( IEEE , 2000 ), pp. 1 – 6 . Jin , X. , Chengkuo , L. , and Hanhua , F. , “ Design, fabrication, and characterization of CMOS MEMS...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_008
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... then, the field of MC-based sensing has witnessed a myriad of technological advancements. MEMS-based MC gas sensors are widely used for the detection of gases due to their cost effectiveness, small size, robust platform, fast response times and high sensitivity. They work on the principle of mechanical...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_007
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... bandwidth filters. High Q resonators made using rings/disks/spheres can have high sensitivity to optical parameter changes, which are brought about by mechanical means in MOEMS, thereby enhancing the sensitivity of sensors, power consumption of switches, and special functionality in actuators. Present-day...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_003
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... and thin polymers easily swellable coated on the paper. When the sensor was exposed to the volatile organic compounds, swelling on the polymer layer occurred. This resulted in the mechanical deflection of the sensor, and the angle of deflection of the sensor was measured using a 3-D protractor which...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_004
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
... on CMOS chemical microsensors ,” Sens. Actuators B Chem.   70 ( 1–3 ), 2 – 11 ( 2000 ). 10.1016/S0925-4005(00)00546-3 Hierold , C. , “ Intelligent CMOS sensors ,” in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) ( IEEE , 2000 ), pp. 1 – 6 . Jin , X...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...-composites for mechanical energy harvesting applications ,” in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) [Internet] ( 2021 ), pp. 875 – 879 . [cited 2021 Aug 14]. Available at: https://ieeexplore.ieee.org/document/9495497/ Bhattacharya , S...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
.... M. , “ Microcantilever-based platforms as biosensing tools ,” Analyst   135 , 827 – 836 ( 2010 ). 10.1039/b908503n Basu , A. K. , Basak , A. , and Bhattacharya , S. , “ Geometry and thickness dependant anomalous mechanical behavior of fabricated SU-8 thin film micro...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735425590_004
EISBN: 978-0-7354-2559-0
ISBN: 978-0-7354-2556-9
... lattice strain and electronic structure changes leading to the conductance modulation in semiconductors is of long-standing interest in materials science and has potential applications in piezoresistive strain gauges, pressure sensors, and cantilever force sensors. Studies have shown that the electronic...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
.... , “ Metagenomics framework for the study of soil microbial communities ,” CSVTU Int. J. Biotechnol. Bioinf. Biomed.   5 (1), 1 – 8 ( 2020 ). 10.30732/IJBBB.20200501001 Basu , A. K. , Basak , A. , and Bhattacharya , S. , “ Geometry and thickness dependant anomalous mechanical behavior...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
10.1063/9780735424395_frontmatter
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...Front Matter MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer...
Book Chapter
Series: AIPP Books, Professional
Published: March 2023
10.1063/9780735425712_003
EISBN: 978-0-7354-2571-2
ISBN: 978-0-7354-2568-2
...Table 3.1 Smartphone sensors based on the literature review. The most common sensors that are integrated in a modern smartphone Less common are the following sensors Camera Barometric pressure sensor Microphone Thermometer 3D accelerometer Pedometer Gyroscope Humidity...
Book Chapter
Series: AIPP Books, Principles
Published: March 2023
0
EISBN: 978-0-7354-2439-5
ISBN: 978-0-7354-2436-4
...-decorated SnO micro-disks to NO2, H2 and CO: Catalyst enhanced sensor response and selectivity ,” Sens. Actuators B Chem.   239 , 253 – 261 ( 2017 ). 10.1016/j.snb.2016.07.157 Bârsan , N. , Huebner , M. , and Weimar , U. , “ Conduction mechanism in semiconducting...