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MEMS Applications in Biology and Healthcare
Edited by
Aviru Kumar Basu
Aviru Kumar Basu
Singapore University of Technology and Design
, Singapore 487372
Institute of Nanoscience and Technology
, Mohali, Sector 81, Sahibzada Ajit Singh Nagar, Punjab 140306,
India
NUS Centre for Advanced 2D Materials,
National University of Singapore
, Singapore 117546

Aviru Kumar Basu, Ph.D., is a scientist/faculty member at Quantum Material and Device Unit (QMAD), Department of Science and Technology, Institute of Nanoscience and Technology, Ministry of Science and Technology, Government of India. Previously, he worked as a Postdoctoral Research Fellow at the National University of Singapore and SUTD, Singapore. He earned his Ph.D. in the field of MEMS from Indian Institute of Technology (IIT), Kanpur, India with a specialization in micro/nanofabrication, biosensors, nanomaterial synthesis, and optical setup development for MEMS-based sensors.

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Adreeja Basu
Adreeja Basu
Department of Biological Sciences,
St. John's University
, New York, N.Y. 11439,
USA

Adreeja Basu, Ph.D., is Adjunct Assistant Professor at St. John's University, New York. She earned her Ph.D. from the Centre for Energy, Indian Institute of Technology (IIT), Guwahati, India. Her area of interest includes functional genomics, marker assistant breeding, and plant evo-devo, and she is currently pursuing postdoctoral studies in plant evolution and development.

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Sagnik Ghosh
Sagnik Ghosh
Institute of Microelectronics
, A-STAR, Singapore 13863

Sagnik Ghosh, Ph.D., is a scientist in the Sensors, Actuators, and Microsystems (SAM) Department, Institute of Microelectronics (IME), A-Star, Singapore. He earned his doctorate from the City University of Hong Kong. During his Ph.D. studies, he worked to develop piezoelectric-on-silicon resonating magnetometers using microelectromechanical systems (MEMS) technology.

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Shantanu Bhattacharya
Shantanu Bhattacharya
Microsystems Fabrication Laboratory, Department of Mechanical Engineering,
Indian Institute of Technology
, Kanpur 208016,
India
Design Programme,
Indian Institute of Technology
, Kanpur 208016,
India

Shantanu Bhattacharya, Ph.D., is Professor of Mechanical Engineering and head of the design program at the Indian Institute of Technology, Kanpur, India. Dr. Bhattacharya is a fellow of the Royal Society of Chemistry, London, the Institution of Electronics and Tele-communication of India, and the Institution of Engineers (India) and is a senior member of IEEE.

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AIP Publishing LLC
DOI:
https://doi.org/10.1063/9780735423954
ISBN electronic:
978-0-7354-2395-4
ISBN print:
978-0-7354-2392-3
Publication date:
2021
Chapter Contents
Book Chapter

Front Matter

By
Aviru Kumar Basu
Aviru Kumar Basu
Singapore University of Technology and Design
, Singapore 487372
Institute of Nanoscience and Technology
, Mohali, Sector 81, Sahibzada Ajit Singh Nagar, Punjab 140306,
India
NUS Centre for Advanced 2D Materials,
National University of Singapore
, Singapore 117546
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;
Adreeja Basu
Adreeja Basu
Department of Biological Sciences,
St. John's University
, New York, N.Y. 11439,
USA
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;
Sagnik Ghosh
Sagnik Ghosh
Institute of Microelectronics
, A-STAR, Singapore 13863
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;
Shantanu Bhattacharya
Shantanu Bhattacharya
Microsystems Fabrication Laboratory, Department of Mechanical Engineering,
Indian Institute of Technology
, Kanpur 208016,
India
Design Programme,
Indian Institute of Technology
, Kanpur 208016,
India
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Doi:
https://doi.org/10.1063/9780735423954_frontmatter
  • Published:
    2021
By
Aviru Kumar Basu;
Aviru Kumar Basu
Singapore University of Technology and Design
, Singapore 487372
Institute of Nanoscience and Technology
, Mohali, Sector 81, Sahibzada Ajit Singh Nagar, Punjab 140306,
India
NUS Centre for Advanced 2D Materials,
National University of Singapore
, Singapore 117546
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Adreeja Basu;
Adreeja Basu
Department of Biological Sciences,
St. John's University
, New York, N.Y. 11439,
USA
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Sagnik Ghosh;
Sagnik Ghosh
Institute of Microelectronics
, A-STAR, Singapore 13863
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Shantanu Bhattacharya
Shantanu Bhattacharya
Microsystems Fabrication Laboratory, Department of Mechanical Engineering,
Indian Institute of Technology
, Kanpur 208016,
India
Design Programme,
Indian Institute of Technology
, Kanpur 208016,
India
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Copyright © 2021 AIP Publishing LLC
2021
AIP Publishing

MEMS Applications in Biology and Healthcare is an extensive review of the fundamentals of various MEMS-based sensing technologies pertaining to clinical diagnostics and detection of biological entities. This book highlights recent developments in MEMS-based sensors used in biology and medicine and explains the fundamental principles and novel processes and materials, focusing on the latest manufactured devices and applications.

This timely book:

  • Provides a state-of-the-art review of biosensors and biomedical microdevices from the MEMS field

  • Addresses recent applicative technologies for specific tasks relating to biology, medicine, and healthcare, in contrast to the sensory research that is carried out in the laboratory

  • Presents an interdisciplinary approach to help build knowledge for professionals working in other domains

This state-of-the-art treatment is essential reading for researchers working in biosensor/bio-MEMS device research. Graduate students, postdoctoral researchers, and research professionals engaged in MEMS-related research and post-graduate students taking MEMS/VLSI courses will also find this an invaluable resource.

Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Contributors

Adreeja Basu

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Biological Sciences, St. John's University, New York, N.Y. 11439, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Aviru Kumar Basu

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Singapore University of Technology and Design, Singapore 487372

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Institute of Nanoscience and Technology, Mohali, Sector 81, Sahibzada Ajit Singh Nagar, Punjab 140306, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

NUS Centre for Advanced 2D Materials, National University of Singapore, Singapore 117546

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Geeta Bhatt

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Microsystems Fabrication Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Shantanu Bhattacharya

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Microsystems Fabrication Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Design Programme, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Ruma Bhattacharyya

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Chemistry, Jadavpur University 188, Raja Subodh Chandra Mallick Road, Kolkata 700032, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Suparno Bhattacharyya

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Engineering Science and Mechanics, Pennsylvania State University, University Park, PA 16802, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Srirupa Chakraborty

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Theoretical Biology and Biophysics, Los Alamos National Laboratory, NM, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Center for Nonlinear Studies, Los Alamos National Laboratory, NM, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Pankaj Singh Chauhan

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Mechanical Engineering, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Aditya Choudhary

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Civil Engineering, MNIT, Jaipur 302017, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Sagnik Ghosh

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Institute of Microelectronics, A-STAR, Singapore 13863

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Arkadeep Kumar

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Civil and Environmental Engineering, University of California, Berkeley, CA 94720, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Applied Materials Inc., Santa Clara, CA 94085, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Mohit Pandey

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Microsystems Fabrication Laboratory, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Design Programme, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Anoop Ramaswamy

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Cognate BioServices, Memphis, TN, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Novartis Pharmaceutical Corp. Morris Plains, NJ, USA

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Mohammed Rashiku

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Microsystems Fabrication Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Amaresh Kumar Sahoo

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Applied Sciences, Indian Institute of Information Technology Allahabad, Prayagraj 211015, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Kanika Saxena

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Civil Engineering, MNIT, Jaipur 302017, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Saurabh Shivalkar

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Department of Applied Sciences, Indian Institute of Information Technology Allahabad, Prayagraj 211015, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Shreyansh Tatiya

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Microsystems Fabrication Laboratory, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

Design Programme, Indian Institute of Technology, Kanpur 208016, India

Keywords:
Nanobiotechnology (Nanotechnology), Nanomedicine (Nanotechnology), Nanotechnology applications (Nanotechnology), Biosensors (Biological physics), Bioengineering (Biological physics), Wearable technology (Electronics)

List of Abbreviations

α-LN

anti-lamin

µ-TAS

micro-total analytical system

μPADs.

microfluidic paper-based analytical devices

ACTFEL

AC-driven thin film electroluminescent device

AFA-LIFT

absorbing film-assisted laser-induced forward transfer

AFM

atomic force microscopy

AI

artificial intelligence

Al2O3

sapphire

ALD

atomic layer deposition

ALE

atomic layer etching

AOPs

advanced oxidation processes

AR

augmented reality

ASIC

application-specific integrated circuits

Au

gold

BIA

batch injection analysis

Bio LP

biological laser processing

BioFETS

bio-field effect transistors

BioMEMS

biological microelectromechanical systems

BOD

biological oxygen demand

BP

blood pressure

BSA

bovine serum albumin

C-MEMS

carbon-microelectromechanical systems

CA

cancer antigen

CAD

computer aided design

CAM

computer aided manufacturing

CAR-T

chimeric antigen receptor T-cell

CDC

center for disease control

CFU

colony forming units

CH3

methyl

CHIT

chitosan

CHO

aldehyde

CMOS

complementary metal oxide semiconductor

CN

cochlear nerve

CNT

carbon nanotube

CO

carbon monoxide

COD

chemical oxygen demand

COOH

carboxyl

COVID

corona virus disease

CPE

carbon paste electrodes

CRISPR-Cas9

clustered regularly interspaced short palindromic repeat-Cas9

CSA

chemical sensor arrays

CTAB

cetyl trimethyl ammonium bromide

CTCs

circulating tumor cells

CVD

chemical vapor deposition

DACS

dielectrophoresis activated cell sorting

DALYS

disability adjusted life years

ddPCR

droplet digital PCR

DFT

density function theory

DNA

deoxyribonucleic acid

DNAA

a protein that activates initiation of DNA

DO

dissolved oxygen

DPV

differential pulse voltammetry

DRIE

deep reactive ion-etching

dsDNA

double stranded DNA

EBL

electron-beam lithography

ECG

electrocardiogram

EDS

energy dispersive spectroscopy

EEG

electroencephalography

EIS

electrochemical impedance spectroscopy

ELISA

enzyme-linked immunosorbent assay

EM

electromagnetic

EMG

electromyography

eMOSFET

embedded MOSFET

En-FETs

enzyme-coupled FET

EOG

electrooculography

FACS

fluorescence activated cell sorting

FBAR

film bulk acoustic wave

FET

field effective transistors

FOBS

fiber-optic biosensors

FPOX

fructosyl-peptide oxidase

FPS

flexible piezo sensor

FPW

flexural plate wave

FRET

fluorescence resonance energy transfer

FTO

fluorine-doped tin oxide

FVH

fructosyl valyl histidine

GCE

glassy carbon electrode

GNP

gold nanoparticles

GO

graphene oxide

GrONPs

graphene oxide nanoparticles

GSH-AgNPs

glutathione-stabilized silver nanoparticles

HIV

human immunodeficiency virus

HMI

human–machine interactions

HPC

high-performance computing

HR

heart rate

HRTEM

high resolution transmission electron microscopy

ID

drain current

IBM

International Business Machines

IBSD

ion beam sputtering deposition

ICAR

intra cochlear acoustic receiver

ICP

inductively coupled plasma

ICP

ion concentration polarization

IDEs

interdigitated electrodes

IDT

interdigital transducer

IgG

immunoglobulin

IPA

isopropanol

ISFET

ion selective field effective transistors

ITO

indium tin oxide

ITRS

industrial technology roadmap for semiconductors

KOH

potassium hydroxide

LC-ARROWs

liquid core anti-resonant reflecting optical waveguide

LCP

liquid crystal polymers

LED

light emitting diode

LGDW

laser-guided direct writing

LIFT

laser-induced forward transfer

LiNbO3

lithium niobate

LiTaO3

lithium tantalate

LM

lamin

LOC

lab-on-chip

LOD

limit of detection

LRET

luminescence resonance energy transfer

LSPR

localized surface plasmon resonance

MACS

magnetic activated cell sorting

MAPLE DW

matrix-assisted pulsed laser evaporation direct writing

MBP

maltose-binding protein

MD

molecular dynamics simulations

MEA

microelectrode array

MEF

metal-enhanced fluorescence

MEMS CMIC

microelectromechanical system condenser microphone

MEMS

microelectromechanical systems

MF

membrane filtration processes

miRNA

micro RNA

ML

machine learning

MMAM

methods and materials for advanced manufacturing

MOFs

microstructured optical fibers / metal organic framework

MOS

metal oxide semiconductor

MTF

multiple tube fermentation

MWCNT

multiwalled carbon nanotube

NEMS

nanoelectromechanical systems

NH2

amine

NO

nitrous oxide

OH

hydorxyl

ORP

oxidation–reduction potential

OSWV

Osteryoung square wave voltammetry

PALD

particle-ALD / plasma assisted ALD

PARYLENE

poly p-xylylene polymer

PC

polycarbonate

PCB

printed circuit board

pCO2

partial pressure of carbon dioxide

PCR

polymerase chain reaction

PCS

plastic clad silica layer

PDA

polydopamine

PDMS

poly(dimethyl)siloxane

PEG

polyethylene glycol

PET

poly(ethylene terephthalate)

PGS

poly(glycerol co-sebacate)

PI

polyimide

PLA

poly(l-lactic acid)

PLGA

poly(l-lactic-co-glycolic)

PLL

poly(l-lysine)

PMMA

poly(methyl methacrylate)

POC

point of care

PPAC

power, performance, area, and cost

PPy

poly(pyrrole)

PS

polystyrene

PSA

prostate-specific antigen

PSL

polystyrene latex

PSP

process–structure–property

PTFE

poly(tetrafluoroethylene)

PTH

parathyroid hormone

PVC

poly(vinyl chloride)

q-PCR

quantitative polymerase chain reaction

QCM

quartz crystal microbalance

r-GO

reduced graphene oxide

RBC

red blood cells

RNA

ribonucleic acid

SARS-COV2

severe acute respiratory syndrome corona virus

SARS

severe acute respiratory syndrome

SAW

surface acoustics wave

SEM

scanning electron microscopy

SERS

surface enhanced Raman scattering

SH-SAW

shear horizontal surface acoustic waves

SH

sulphydryl

Si3N4

silicon nitride

SiO2

quartz

SiO2

silicon dioxide

SMA

spinal muscular atrophy

SMN

survival motor neuron

SNR

signal to noise ratio

SOG

spin of glass

SPR220

Shipley Photoresist 220

SPR

surface plasmon resonance

SRP

selective removal processes

ssDNA

single-stranded DNA

SU8

epoxy-based negative photoresist

SWCNT

single-walled carbon nanotube

TB

tuberculosis

TCR

T-cell receptor

TDS

total dissolved solids

TEM

transmission electron microscopy

TGC

targeted genome capture

THz

terahertz

TIN

titanium nitride

TiO2

titanium dioxide

TIR

total internal reflection

TOC

total organic carbon

TPE

tetraphenylethene

TSS

total suspended solids

UME

ultra microelectrode

UUV

unmanned underwater vehicle

UV-Vis

ultraviolet–visible

UV

ultraviolet

VDS

voltage drain to source

VLSI

very large scale integration

VR

virtual reality

WBC

white blood cells

WGA

whole genome amplification

WHO

World Health Organization

ZFN

zinc finger nucleases

ZnO

zinc oxide

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