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Passive Silicon Photonic Devices: Design, Fabrication, and Testing
By
Yikai Su;
Yikai Su
Department of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,
Shanghai Jiao Tong University
, Shanghai 200240, China
Search for other works by this author on:
Yong Zhang
Yong Zhang
Department of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,
Shanghai Jiao Tong University
, Shanghai 200240, China
Search for other works by this author on:
AIP Publishing LLC
ISBN electronic:
978-0-7354-2431-9
ISBN print:
978-0-7354-2428-9
Publication date:
2022
Passive Silicon Photonic Devices: Design, Fabrication, and Testing
By: Yikai Su, Yong Zhang
https://doi.org/10.1063/9780735424319
ISBN (print): 978-0-7354-2428-9
ISBN (electronic): 978-0-7354-2431-9
Publisher: AIP Publishing LLC
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$135.00
Table of Contents
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Front MatterByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 1: History and Current StatusByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 2: Silicon-Family Materials and WaveguidesByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 3: Design of Passive Silicon Photonic DevicesByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 4: Nano-Fabrication ProcessByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 5: Equipment and Materials in CleanroomByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 6: Testing of Passive DevicesByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 7: Photonic Integrated CircuitsByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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Chapter 8: Perspective on Passive Silicon Photonic DevicesByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:
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IndexByYikai Su;Yikai SuDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on:Yong ZhangYong ZhangDepartment of Electronic Engineering, State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University, Shanghai 200240,ChinaSearch for other works by this author on: