MEMS Applications in Electronics and Engineering
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Table of Contents
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Front MatterByAviru Kumar Basu;Aviru Kumar BasuQuantum Material and Device Unit,Institute of Nanoscience and Technology, Department of Science and Technology, Mohali, Punjab 140306,IndiaSearch for other works by this author on:Adreeja Basu;Adreeja BasuDepartment of Biological Sciences,St. John's University, New York 11439,USASearch for other works by this author on:Sagnik Ghosh;Sagnik GhoshInstitute of Microelectronics, A-STAR,Singapore138632Search for other works by this author on:Shantanu BhattacharyaShantanu BhattacharyaDepartment of Mechanical Engineering,Indian Institute of Technology, Kanpur 208016,IndiaSearch for other works by this author on:
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Chapter 1: Introduction to MEMS Applications in Electronics and EngineeringByA. Basu;A. BasuDepartment of Biological Sciences,ST. John's University, New York 11439,USASearch for other works by this author on:A. K. Basu;A. K. BasuQuantum Material and Device Unit,Institute of Nanoscience and Technology, Department of Science and Technology, Mohali, Punjab 140306,IndiaSearch for other works by this author on:S. Ghosh;S. GhoshInstitute of Microelectronics, A-STAR,Singapore138632Search for other works by this author on:S. BhattacharyaS. BhattacharyaDepartment of Mechanical Engineering,Indian Institute of Technology, Kanpur 208016,IndiaSearch for other works by this author on:
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Chapter 2: Scaling LawByAviru Kumar Basu;Aviru Kumar BasuQuantum Material and Device Unit,Institute of Nanoscience and Technology, Department of Science and Technology, Mohali, Punjab 140306,IndiaSearch for other works by this author on:Suparno BhattacharyyaSuparno BhattacharyyaInternational Center for Automotive Research,Clemson University, Clemson, South Carolina 29634,USADepartment of Engineering Science and Mechanics,Pennsylvania State University, University Park, Pennsylvania 16802,USASearch for other works by this author on:
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Chapter 3: Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication TechniquesByAviru Kumar BasuAviru Kumar BasuQuantum Material and Device Unit,Institute of Nanoscience and Technology, Department of Science and Technology, Mohali, Punjab 140306,IndiaSearch for other works by this author on:
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Chapter 4: Recent Trends in CMOS-MEMS SensorsByManoj BhattManoj BhattDepartment of Electronics and Communication Engineering,GB Pant University of Agriculture and Technology, Pantnagar, UttarakhandSearch for other works by this author on:
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Chapter 5: Mechanics of Materials Considerations in MEMS-Based Medical DevicesBySuparno Bhattacharyya;Suparno BhattacharyyaInternational Center for Automotive Research,Clemson University, Clemson, South Carolina 29634,USADepartment of Engineering Science and Mechanics,Pennsylvania State University, University Park, Pennsylvania 16802,USASearch for other works by this author on:Arkadeep KumarArkadeep KumarEnergy Technologies Area, Lawrence Berkeley National Laboratory, Berkeley, California 94720,USASearch for other works by this author on:
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Chapter 6: Progress in RF MEMS/NEMS SwitchesByDeepak Bansal;Deepak BansalCSIR-Central Electronics Engineering Research Institute, Pilani 333031,IndiaSearch for other works by this author on:Kamaljit Rangra;Kamaljit RangraCSIR-Central Electronics Engineering Research Institute, Pilani 333031,IndiaSearch for other works by this author on:Ajay AgarwalAjay AgarwalIndian Institute of Technology, Jodhpur 342030,IndiaSearch for other works by this author on:
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Chapter 7: Optical MEMS (Microspheres and Ring Resonators): Overview of Recent ProgressByViswas SadasivanViswas SadasivanDepartment of Electronics and Communication Engineering,Amrita Vishwa Vidyapeetham, Amritapuri,IndiaSearch for other works by this author on:
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Chapter 8: Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing ApplicationsByAnwesha Mukherjee;Anwesha MukherjeeDepartment of Physical Electronics, School of Electrical Engineering,Tel Aviv University, Ramat Aviv 6997801,Israel
a) Search for other works by this author on:Tushar SakorikarTushar SakorikarDepartment of Electronic Systems Engineering,Indian Institute of Science, Bangalore,Indiaa) Search for other works by this author on: -
Chapter 9: MEMS-Based Energy Harvesting Devices: Overview of Recent ProgressByDhiman Mallick;Dhiman MallickDepartment of Electrical Engineering,Indian Institute of Technology Delhi, New Delhi 110016,IndiaSearch for other works by this author on:Sourav Naval;Sourav NavalDepartment of Electrical Engineering,Indian Institute of Technology Delhi, New Delhi 110016,IndiaSearch for other works by this author on:Nadeem Tariq BeighNadeem Tariq BeighDepartment of Electrical Engineering,Indian Institute of Technology Delhi, New Delhi 110016,IndiaSearch for other works by this author on:
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IndexByAviru Kumar Basu;Aviru Kumar BasuQuantum Material and Device Unit,Institute of Nanoscience and Technology, Department of Science and Technology, Mohali, Punjab 140306,IndiaSearch for other works by this author on:Adreeja Basu;Adreeja BasuDepartment of Biological Sciences,St. John's University, New York 11439,USASearch for other works by this author on:Sagnik Ghosh;Sagnik GhoshInstitute of Microelectronics, A-STAR,Singapore138632Search for other works by this author on:Shantanu BhattacharyaShantanu BhattacharyaDepartment of Mechanical Engineering,Indian Institute of Technology, Kanpur 208016,IndiaSearch for other works by this author on: