Chapter 9: Etching of β-Ga2O3
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Published:2023
Hsien-Chih Huang, Xiuling Li, "Etching of β-Ga2O3", Ultrawide Bandgap β-Ga2O3 Semiconductor: Theory and Applications, James S. Speck, Esmat Farzana
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Hsien-Chih Huang, Xiuling Li, "Etching of β-Ga2O3", Ultrawide Bandgap β-Ga2O3 Semiconductor: Theory and Applications, James S. Speck, Esmat Farzana
Download citation file: