We present Auger spectra of titanium hydride (TiHy) and titanium films, covered by ultrathin gold layers. The TiHy films were obtained due to hydrogen interaction with the Ti film deposited in situ onto a Pyrex glass substrate under UHV conditions. Both Ti and TiHy films were then covered in situ by a nanoscale Au layer. The Auger analyses were performed in separate systems. Analysis of the features of the Ti Auger spectra during the sputter profile measurements allow the TiHy to be distinguished and characterized in the bulk region of the Au/TiHy layer.
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