Complex dielectric function (ɛ = ɛ1 + 2) spectra of a heat treated single crystal yttria-stabilized zirconia (YSZ) have been determined over a spectral range of 0.03–8.5 eV using spectroscopic ellipsometry. Spectra are collected using three instruments covering different parts of the measured spectrum. The YSZ sample is modeled as a semi-infinite bulk crystal covered by a surface layer described by a Bruggeman effective medium approximation of equal parts YSZ and void.

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