Optical functions of uniaxial zinc oxide (ZnO) revisited Available to Purchase

The optical functions of uniaxial ZnO are determined from 200 to 850 nm (6.2–1.46 eV) using three different ellipsometric techniques: (1) standard spectroscopic two-modulator generalized ellipsometry (2-MGE), (2) transmission two-modulator generalized ellipsometry, and (3) near-normal incidence two modulator generalized ellipsometry microscopy (2-MGEM). The 2-MGE results in very accurate values of the dielectric functions and error estimates from 1.46 to 6.2 eV, while the transmission 2-MGE results in more accurate values of the birefringence and associated errors below the band edge where ZnO is transparent. The 2-MGEM also measures the diattenuation (which is related to the birefringence) and other parameters, but at near-normal incidence at a single wavelength (577 nm). The 2-MGEM is designed as a scanning instrument resulting in these parameters being measured over a surface.