Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered Ta and Ta2O5 samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.

Topics
Thin films, Electrochemical oxidation, Surface science, X-ray photoelectron spectroscopy
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2023 Published under an exclusive license by the AVS.
2023
Author(s)

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