Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on silicon, silicon dioxide, silicon nitride, silicon carbide, and poly(dimethyl siloxane) samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
HAXPES reference spectra of Si, SiO2, SiN, SiC, and poly(dimethyl siloxane) with Cr Kα excitation
Note: This paper is part of the 2023 Special Topic Collection on Higher Energy X-ray Photoelectron Spectroscopy.
Dong Zheng, Christopher N. Young, William F. Stickle; HAXPES reference spectra of Si, SiO2, SiN, SiC, and poly(dimethyl siloxane) with Cr Kα excitation. Surf. Sci. Spectra 1 December 2023; 30 (2): 024001. https://doi.org/10.1116/6.0002660
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