Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on silicon, silicon dioxide, silicon nitride, silicon carbide, and poly(dimethyl siloxane) samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.

1.
J. F.
Moulder
,
W. F.
Stickle
,
P. E.
Sobol
, and
K. D.
Bomben
,
Handbook of X-Ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data
, edited by
J.
Chastain
(
Physical Electronics
,
Eden Prairie, MN
,
1995
).
2.
See supplementary material online for ASCII data for all of the illustrated spectra.

Supplementary Material

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