Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on silicon, silicon dioxide, silicon nitride, silicon carbide, and poly(dimethyl siloxane) samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
REFERENCES
1.
J. F.
Moulder
, W. F.
Stickle
, P. E.
Sobol
, and K. D.
Bomben
, Handbook of X-Ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data
, edited by J.
Chastain
(Physical Electronics
, Eden Prairie, MN
, 1995
).2.
See supplementary material online for ASCII data for all of the illustrated spectra.
2023 Published under an exclusive license by the AVS.
2023
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