HAXPES reference spectra of Si, SiO₂, SiN, SiC, and poly(dimethyl siloxane) with Cr K_α excitation

Monochromatic Cr K_α radiation (5414.8 eV) has been used to acquire XPS and Auger data on silicon, silicon dioxide, silicon nitride, silicon carbide, and poly(dimethyl siloxane) samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.