Hafnium oxide (HfO2) grown by atomic layer deposition on Si was analyzed using high-resolution high-energy x-ray photoelectron spectroscopy (HAXPES). The HAXPES spectra of HfO2 obtained using monochromatic Cr Kα radiation at 5414.8 eV include two survey scans (Al Kα and Cr Kα) and high-resolution spectra of Hf 3s, Hf 3p3/2, Hf 3d5/2, Hf 4p3/2, Hf 4d, Hf 4f, Hf 4s, and O 1s.
High-energy x-ray photoelectron spectroscopy spectra of HfO2 measured by Cr Kα
Note: This paper is part of the 2022 Special Topic Collection on Higher Energy X-ray Photoelectron Spectroscopy.
C. Zborowski, A. Vanleenhove, I. Hoflijk, I. Vaesen, K. Artyushkova, T. Conard; High-energy x-ray photoelectron spectroscopy spectra of HfO2 measured by Cr Kα. Surf. Sci. Spectra 1 June 2022; 29 (1): 014019. https://doi.org/10.1116/6.0001530
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