TiZrN thin films were prepared by DC magnetron sputtering on silicon (111) substrates. Samples were subjected to different temperature conditions (200, 400, and 600 °C) under a flow of carbon dioxide to emulate a corrosive atmosphere. Each treatment was performed in situ. X-ray photoelectron spectroscopy was used to examine the surface chemical changes on TiZrN thin films before and after the treatments. Survey spectra and C 1s, O 1s, N 1s, Ti 2p, and Zr 3d core level spectra were measured for each sample. Results show remarkable differences in all spectra when the sample was heated over 400 °C. At these temperatures, it is evident that the coating undergoes the greatest chemical change since metals cease to be nitrides and oxidize.
REFERENCES
1.
A.
Cavaliero
and J. T.
De Hosson
, Nanostructures Coatings
(Springer
, Berlin
, 2006
).2.
R. L.
Boxman
, V. N.
Zhitomirsky
, I.
Grimberg
, L.
Rapoport
, S.
Gold-smith
, and B. Z.
Weiss
, Surf. Coat. Technol.
125
, 257
(2000
). 3.
H.
Hasegawa
, M.
Kawate
, A. K.
Hashimoto
, and T.
Suzuki
, Ternary nitride films synthesized by cathodic arc method
, in Novel Materials Processing by Advanced Electromagnetic Energy Sources
, edited by S.
Miyake
(Elsevier
, Amsterdam
, 2005
), pp. 437
–440
.4.
W. D.
Münz
, J. Vac. Sci. Technol. A
4
, 2717
(1986
). 5.
Y.
Massiani
, P.
Gravier
, L.
Fedrizzi
, and F.
Marchetti
, Thin Solid Films
261
, 202
(1995
). 6.
O.
Knotek
, M.
Atzor
, A.
Barimani
, and F.
Jungblut
, Surf. Coat. Technol.
42
, 21
(1990
). 7.
C.
Wiemer
, F.
Levy
, and F.
Bussy
, Surf. Coat. Technol.
68
, 181
(1994
). 8.
J.
Musil
, H.
Jankovcova
, and V.
Cibulka
, Czech. J. Phys.
49
, 359
(1999
). 9.
L.
Hultman
, M.
Shinn
, P. B.
Mirkarimi
, and S. A.
Barnett
, J. Cryst. Growth
135
, 309
(1994
). 10.
G.
Rupprechter
, Adv. Catal.
51
, 133
(2007
).11.
R.
Wang
, D.
Ding
, W.
Wei
, and Y.
Cui
, “Near ambient pressure adsorption of nickel carbonyl contaminated CO on Cu(111) surface
,” Chin. J. Chem. Phys.
(2019
).12.
I.
Milošev
, H. H.
Strehblow
, B.
Navinšek
, and P.
Panjan
, Surf. Sci. Spectra
6
, 177
(1999
). 13.
C. M.
Chan
, S.
Trigwell
, and T.
Duerig
, Surf. Interface Anal.
15
, 349
(1990
). 14.
D.
Gonbeau
, C.
Guimon
, G.
Pfister-Guillouzo
, A.
Levasseur
, G.
Meunier
, and R.
Dormoy
, Surf. Sci.
254
, 81
(1991
). 15.
F.
Lange
, H.
Schmelz
, and H.
Knozinger
, J. Electron Spectrosc. Relat. Phenom.
57
, 307
(1991
). 16.
H.
Bender
, W.
Chen
, J.
Portillo
, L.
Van den Hove
, and W.
Wandervorst
, Appl. Surf. Sci.
38
, 37
(1989
). 17.
F.
Werfel
and O.
Brummer
, Phys. Scripta
28
, 92
(1983
). 18.
C.
Ocal
and S.
Ferrer
, Surf. Sci.
191
, 147
(1987
). 19.
I.
Bespalov
, M.
Datler
, S.
Buhr
, W.
Drachsel
, G.
Ruppretcher
, and Y.
Suchorski
, Ultramicroscopy
159
, 147
(2015
). 20.
D. D.
Sarma
and C. N. R.
Rao
, J. Electron Spectrosc. Relat. Phenom.
20
, 25
(1980
). 21.
V. I.
Nefedov
, D.
Gati
, B. F.
Dzhurinskii
, N. P.
Sergushin
, and Y. V.
Salyn
, Zh. Neorg. Khim.
20
, 2307
(1975
).22.
J. H.
Quintero
, A.
Mariño
, L.
Šiller
, E.
Restrepo-Parra
, and F. J.
Caro-Lopera
, Surf. Coat. Technol.
309
, 249
(2017
). 23.
J. H.
Quintero
, A.
Mariño
, and P. J.
Arango
, J. Phys. Conf. Ser.
466
(2013
). 24.
P. G.
Rouxhet
and M. J.
Genet
, Surf. Interface Anal.
43
, 1453
(2011
). 25.
L.
Šiller
, M. R. C.
Hunt
, J. W.
Brown
, J. M.
Coquel
, and P.
Rudolf
, Surf. Sci.
513
, 78
(2002
). 26.
V. B.
Wiertz
and P.
Bertrand
, Proceedings International Conference on Polymer-Solid Interfaces, ICPSI-2
, 12–16 August Facultés Universitaires Notre-Dame de la Paix, Namur (Belgium) (Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, 1996).27.
W. E.
Slinkard
and P. B.
Degroot
, J. Catal.
68
, 423
(1981
). 28.
P. O.
Larsson
, A.
Anderson
, L. R.
Wallenberg
, and B.
Svensson
, J. Catal.
163
, 279
(1996
). 29.
C.
Sleigh
, A. P.
Pijpers
, A.
Jaspers
, B.
Coussens
, and R. J.
Meier
, J. Electron Spectrosc. Relat. Phenom.
77
, 41
(1996
). 30.
D. D.
Sarma
and C. N. R.
Rao
, J. Electron Spectrosc. Relat. Phenom.
20
, 25
(1980
). 31.
D.
Escobar
, R.
Ospina
, A. G.
Gómez
, and E.
Restrepo-Parra
, Ceram. Int.
41
, 947
(2015
). 32.
H. M.
Tung
, P. H.
Wu
, G. P.
Yu
, J. H.
Huang
, Vacuum
115
, 12
(2015
). © 2019 Author(s).
2019
Author(s)
You do not currently have access to this content.
