Near-ambient pressure x-ray photoelectron spectroscopy (NAP-XPS) is a less traditional form of XPS that allows samples to be analyzed at relatively high pressures, i.e., greater than 2500 Pa. With NAP-XPS, XPS can probe moderately volatile liquids, biological samples, porous materials, and/or polymeric materials that outgas significantly. In this submission, we show the survey, O 1s, valence band, and O KLL Auger NAP-XPS spectra of oxygen gas, O2, a material that would be difficult to analyze by conventional XPS. A small N 1s signal from N2(g) is also observed in the survey spectrum. The O 1s narrow scan is fit to Gaussian-Lorentzian sum functions. The Lorentzian character of this synthetic line shape was varied to obtain the best fit. Since it is likely that O2(g) will be present in other NAP-XPS analyses, these data should serve as a useful reference for other researchers.

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